Edwards EMO Cable for Installing A New-Style iXL or iXH Series Dry Semiconductor Pump On A Tool With Existing Old-Style iH Series Pumps.
Ideal Vacuum supplies our own interface cable, which allows replacement of an older style iH series pump with the style IXL120N, iXH100, or iXH610. This EMO cabling is useful for applications where a semiconductor tool has multiple old style iH pumps attached in the sub fab. This interface module cable continues the EMO circuit across the remaining old-style iH pumps and through the new style iXL120N replacement pump. The connections and different interface modules are described in detail below. This cable is typically connected from P2 (output) of iTIM on left side iH, to Emergency Stop (EMS) connector on iXL120N, to J1 (input) of iTIM on right side iH pump (see details in our Application Note in pdf format).
The issue is that the Edwards iH series pumps are now discontinued and no longer available. Ideal Vacuum stocks the replacement pumps, iXL120N for load lock, iXH100 (replaces iH80), iXH610 (replaces iH600), and so on. The new iXL120N pump does not have an EMO button on the front like the old style IH pumps (see details in our Application Note). The Edwards iTIM was often configured with older style Edwards iH series dry semiconductor vacuum pumps where multiple pumps are connected to a single semiconductor tool in the sub-fab. The EMO cabling is set up to shut down the tool if an EMO is pressed on any of the iH series pumps, they are typically cabled in series, in a daisy chain configuration.