Skip to main content
× Home Services Products Catalogs Downloads TechSupport About Contact Careers (505) 872-0037

(505) 872-0037

Shopping Cart Icon
Login Icon
Language Selector
Middle East & Africa
Asia Pacific & Japan
Edwards nEXT300D TStations On Sale Adixen 2021C2 Pumps On Sale Pfeiffer ASM340 Leak Detectors On Sale Agilent IDP-15 Dry Scroll Vacuum Pumps On Sale Agilent IDP-10 Dry Scroll Vacuum Pumps On Sale Ideal Vacuum XG-110 Portable Digital Thermocouple Controllers On Sale

Keyword       Part Number:      

× Vacuum Pumps Modular Vacuum Chambers Stainless Steel Vacuum Chambers Aluminum Vacuum Chambers ExploraVAC Unlimited Chambers ExploraVAC Vacuum Chambers Fittings and Flanges Feedthroughs Vacuum Valves Rebuild Kits, Parts, And Motors Vacuum Fluids, Oils, and Greases Turbo Pumps And Controllers Filters Traps and Silencers Convection and Vacuum Ovens Leak Detection and RGA Vacuum Pressure Measurement Recirculating Chillers And Water Baths


Product Image 1
Product Image 2
Product Image 3
40% OFF

Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC010A121000

Part Number:
  Full Manufacturer's Warranty

Available Now   4  


On Sale: $20,595.60

Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC010A121000 20595.6
Currency: US Dollar (USD)


Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph.
Edwards Part Number AC010A121000.

The Edwards iXH 100 is a new range of dry pumps built for green manufacturing and the processing of harsh chemical processes. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pumps, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXH will deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes especially with HARSH Chemicals.

The Edwards iXH 100 Series Pumps are compact and of light-weight design, combined with exceptionally low noise and vibration, makes iXH the most versatile chemical dry pump in the Edwards range. iXH will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact. iXH pumps are designed for use in most semiconductor processes while delivering significant reductions in input power. This model DOES NOT have a booster blower pump for added performance. For complete Instruction Manual see DOWNLOADS.

  • Primarily for HARSH Chemical Applications
  • Peak Pumping Speed 100 m3/h-1 (59 CFM)
  • Ultimate Pressure 1.5 X 10-2 Torr
  • No preventative maintenance required
  • Contains Primary Pump Only
  • 3/8 inch Quick Connect Water Fillings
  • Water & Power Connection Mating Halves
  • SS Water Cooling System
  • Multi Mode 44 slm Gas Module

  • Load Lock
  • Transfer
  • Meteorology
  • Lithography
  • Physical Vapor Deposition PVD Process
  • Physical Vapor Deposition PVD Pre-clean
  • Rapid Thermal Anneal RTA
  • Strip/Ashing
  • Etching
  • Implant Source
  • High-Density Plasma Chemical Vapor Deposition HDP CVD
  • Rapid Thermal Processing RTP
  • Sub-Atmospheric Chemical Vapor Deposition SACVD
  • Tungsten Chemical Vapor Deposition WCVD
  • Modified Chemical-Vapor Deposition MCVD
  • Plasma-Enhanced Chemical Vapor Deposition PECVD
  • Low Pressure Chemical Vapor Deposition LPCVD


Marca de agua con el logotipo de Ideal Vacuum
Ideal Vacuum Products , LLC
5910 Midway Park Blvd NE
Albuquerque, New Mexico 87109-5805 USA

Phone: (505) 872-0037
Fax: (505) 872-9001

Press ESC to Close

deepbox image 2
load time = 1.1094