MKS Instruments T3BIB SMART THROTTLE 60MM NW63, Non-Sealing Direct Drive, up to 105°C Viton, Analog/TTL, 15 VDC @ 650 mA total, PWR V1.5. MKS Part Number: T3BIB60N21V0215 The MKS Type T3B Throttle Valve is designed for use in downstream pressure control applications. The T3B unit consists of a throttle valve with an electronic housing attached to the motor plate, a microprocessor, driver circuits which eliminate the need for a separate controller box, analog inputs for pressure or position control, and analog outputs that reflect pressure or valve position. The valve is controlled by using analog inputs. The operation of the controller is based on a digital pressure/position control algorithm that directs the valve to the proper position for either pressure or position control. The pressure or position setpoint is sent as an external voltage applied to the Auxiliary connector located on top of the unit (refer to Figure 3, page 14 of the .pdf below). The T3B unit reads the pressure signal used for control applications directly from an MKS Baratron pressure transducer. When the T3B controller is turned off or experiences an unexpected power loss, all calibration constants and the last valve position are saved in non-volatile memory. Therefore, when you re-power the unit, it will be calibrated and ready for operation. Protection from RF interference and noisy electrical environments is increased by the use of a metal case, by internal design elements, and by the use of surge and ESD suppression networks and RFI filtering on all inputs and outputs. The T3B unit meets the testing standards required for the European CE Mark when used with an overall metal braided shielded cable, properly grounded at both ends. For complete installation and operation, see MKS T3B Throttle with Analog/TTL Interface Manual.pdf below.

MKS T2BA Butterfly Exhaust Throttle Valve, KF40, "F-Seal" (Viton O-ring on flapper), Low Power Motor (8 in-lbs), 105°C, RS232, with +/-15VDC Sensor Power Supply (for Baratron). MKS Part Number: T2BA01K320003V210025. The MKS T2BA Exhaust Throttle Valve is specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement. Product Features:Compact pressure control system - valve with integrated on-board controller electronics - Easy integration, no need for additional cables or rack space High-speed configurations available (<250 msec. open to close) - Faster set point and recovery from flow and pressure perturbations - Enables high tool throughput Selectable high torque drives - Extends uptime in harsh process conditions Dual channel Baratron® sensor input with range auto switching - Supports wide dynamic pressure control range - Allows for high pressure control accuracy Advanced model-based pressure control algorithm - Minimizes time to set point - Ensures repeatable process recipes without operator involvement Available in low conductance soft-sealing versions - Supports high-pressure processes even at low flows (Epi, RTP, SACVD and more) - Suitable for "house exhaust" or atmospheric applications Provides power for connected Baratron capacitance manometers (optional, some models) The T2BA Exhaust Throttle Valve can operate in two primary modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. EtherCAT T2BA is fully compatible with EtherCAT manometers. Analog manometers require a gateway. The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The "intelligent instrument" concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. The T2BA utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and extends preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2BA is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments.The T2BA valves are optionally heatable up to 200°C with available MKS external heaters (proper selection of seal materials is required). The T2BA is available in unique MKS low-conductance versions, enabling high-speed pressure control in atmospheric applications, including exhaust pressure control, CVD and RTP without a need for relying on O-Ring-based designs to minimize valve conductance. An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosion-resistant 316 stainless steel compatible with most process gases and is available in standard ISO flange styles with bore sizes from 1" to 4" (alternate sizes available on a custom basis). Standard seals offered are Viton®, alternate materials can be specified for compatibility with various process chemistries and/or heated applications.

MKS T2BA Butterfly Exhaust Throttle Valve, ISO100, Non-Sealing (No O-ring; 0.003" Radial Gap), Low Power Motor (8 in-lbs), 105°C,Viton (body seal), RS232, with +/-15VDC Sensor Power Supply (for Baratron). MKS Part Number: T2BA04N220303V210025. The MKS T2BA Exhaust Throttle Valve is specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement. Product Features:Compact pressure control system - valve with integrated on-board controller electronics - Easy integration, no need for additional cables or rack space High-speed configurations available (<250 msec. open to close) - Faster set point and recovery from flow and pressure perturbations - Enables high tool throughput Selectable high torque drives - Extends uptime in harsh process conditions Dual channel Baratron® sensor input with range auto switching - Supports wide dynamic pressure control range - Allows for high pressure control accuracy Advanced model-based pressure control algorithm - Minimizes time to set point - Ensures repeatable process recipes without operator involvement Available in low conductance soft-sealing versions - Supports high-pressure processes even at low flows (Epi, RTP, SACVD and more) - Suitable for "house exhaust" or atmospheric applications Provides power for connected Baratron capacitance manometers (optional, some models) The T2BA Exhaust Throttle Valve can operate in two primary modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. EtherCAT T2BA is fully compatible with EtherCAT manometers. Analog manometers require a gateway. The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The "intelligent instrument" concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. The T2BA utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and extends preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2BA is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments.The T2BA valves are optionally heatable up to 200°C with available MKS external heaters (proper selection of seal materials is required). The T2BA is available in unique MKS low-conductance versions, enabling high-speed pressure control in atmospheric applications, including exhaust pressure control, CVD and RTP without a need for relying on O-Ring-based designs to minimize valve conductance. An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosion-resistant 316 stainless steel compatible with most process gases and is available in standard ISO flange styles with bore sizes from 1" to 4" (alternate sizes available on a custom basis). Standard seals offered are Viton®, alternate materials can be specified for compatibility with various process chemistries and/or heated applications.