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Edwards iXL600N Dry Vacuum Pump. 200-460 V 50/60 Hz 3 Phase Supply. 600 m3h-1 Peak Pumping Speed. Includes: 3/8" Quick Connect Water Fittings. Edwards PN: A54134010.

Print Version
Condition:
  New
Part Number:
  P1011656
Warranty:
  Full Manufacturer's Warranty

Out of Stock   

$38,367.00

On Sale: $26,856.90

Edwards iXL600N Dry Vacuum Pump. 200-460 V 50/60 Hz 3 Phase Supply. 600 m3h-1 Peak Pumping Speed. Includes: 3/8" Quick Connect Water Fittings. Edwards PN: A54134010. 26856.9
Currency: US Dollar (USD)

Description

Edwards iXL600N Dry Vacuum Pump. 200-460 V 50/60 Hz 3 Phase Supply. 600 m3h-1 Peak Pumping Speed. Includes: 3/8" Quick Connect Water Fittings.
Edwards PN: A54134010

The iXL600N is a combination dry pump and booster system. The systems are for use on light duty applications and the N variant are fitted with a gas module that supplies nitrogen purge gas to the pump mechanism areas. The stator, motor, and the inverter drives are water cooled. The pumping systems can be controlled by the front panel, a PDT accessory or by the tool via MicroTIM. The dry pump systems are intended for use on load lock and light duty applications. Common applications include Load Lock, Transfer, Metrology, Lithography, PVD Process and PVD Pre-Clean.
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CONTACT US
Ideal Vacuum Products , LLC
5910 Midway Park Blvd NE
Albuquerque, New Mexico 87109-5805 USA

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



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