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Edwards Dry Vacuum Pump iXL120 E 200-460VAC HIT 3/8 QC Water Fittings. PN: A54113610

Print Version
Condition:
  New
Part Number:
  P109749
Warranty:
  Full Manufacturer's Warranty

Out of Stock   

$22,509.00

On Sale: $15,756.30

Edwards Dry Vacuum Pump iXL120 E 200-460VAC HIT 3/8 QC Water Fittings. PN: A54113610 15756.3
Currency: US Dollar (USD)

Description

Edwards Dry Vacuum Pump iXL120 E 200-460VAC HIT 3/8 QC Water Fittings. Compact, Small & Light. Edwards Part Number A54113610.

The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment.

Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs

    Edwards iXL120 Features and Benefits:

  • Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs
  • Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
  • Unique dual inlet arrangement allows efficient foreline routing and location options
  • Green Mode can reduce power consumption by up to 92% during idle periods
  • Class leading chamber pump down time reduces total average cycle time (TACT)
  • Up to 35°C water supply helps reduce facility cooling water requirements
  • Only 0.55 kW1 power consumption helps minimise customer cost of ownership
  • A single variant covers the supply voltage range 200-460 V, 50/60 Hz
  • Extremely small and light, helping to save valuable fab space

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CONTACT US
Ideal Vacuum Products , LLC
5910 Midway Park Blvd NE
Albuquerque, New Mexico 87109-5805 USA

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



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