Inficon 350-068 PSG500 Digital Pirani Standard Gauge, CF-R(CF 1.33) Extended Body, Tungsten Filament, No set points
Inficon PN: 350-068
This Inficon PSG500 digital Pirani standard gauge has an CF-R(CF 1.33) extended body, no setpoints and stainless steel measuring cell with tungsten filament and metal-sealed feedthrough.
The Inficon PSG5xx series gauges feature a compact, streamlined design, with a rugged aluminum housing and replaceable stainless steel sensor cell, qualifying them for use on semiconductor systems and for standard applications, such as forelines.
Measurement range (air, 02, CO, N2) is 5 x 10-4 to 1000mbar (3.75 x 10-4 to 750 Torr). One tactile switch for ATM and HV makes adjustments simple.
PSG500 series gauges can mount in any orientation and logarithmic signal output through the RJ-45 connector makes integration easy.
Other PSG5xx series gauges have 2 setpoints and filaments for corrosive applications.
The Inficon PSG5xx series digital Pirani standard gauges can be used with Inficon VGC501, VGC502 and VGC503 pressure gauge controllers and require a separate signal cable (P104428).
- OAL: 186.3 mm (7.34 in)
- Width: 32.8 mm (1.29 in.)