Skip to main content
× Home Services Products Catalogs Downloads Tech Support About Contact Careers (505) 872-0037

(505) 872-0037

Shopping Cart Icon
cart
 
Login Icon
login
Agilent Varian Helium Leak Detectors On Sale Edwards iXH Dry Semiconductor Pumps On Sale Leybold BCS Series Pumps On Sale Agilent IDP-10 Dry Scroll Vacuum Pumps On Sale Edwards nXR Multi Stage Roots Pumps On Sale Leybold VaroDry Series Pumps

Keyword       Ideal Vacuum Part Number       Manufacturer Part Number

× Vacuum Pumps Modular Vacuum Chambers Welded Vacuum Chambers ExploraVAC Test Chambers Fittings and Flanges Feedthroughs Vacuum Valves Rebuild Kits, Parts, And Motors Vacuum Fluids, Oils, and Greases Turbo Pumps And Controllers Filters Traps and Silencers Vacuum Ovens Gas and Leak Detection Gauges And Controllers Pressure Measurement Chillers
×

Load

Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC010A121000
Out of Stock
Expecting: 4
Arrival: 4 on 2021-11-20


Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. Edwards Part Number AC010A121000 The Edwards iXH 100 is a new range of dry pumps built for green manufacturing and the processing of harsh chemical processes. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pumps, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXH will deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes especially with HARSH Chemicals. The Edwards iXH 100 Series Pumps are compact and of light-weight design, combined with exceptionally low noise and vibration, makes iXH the most versatile chemical dry pump in the Edwards range. iXH will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact. iXH pumps are designed for use in most semiconductor processes while delivering significant reductions in input power. This model DOES NOT have a booster blower pump for added performance. For complete Instruction Manual see Downloads to the side. FEATURES and BENEFITS: Primarily for HARSH Chemical Applications Peak Pumping Speed 100 m3/h-1 (59 CFM) Ultimate Pressure 1.5 X 10-2 Torr No preventative maintenance required Contains Primary Pump Only 3/8 inch Quick Connect Water Fillings Water & Power Connection Mating Halves SS Water Cooling System Multi Mode 44 slm Gas Module APPLICATIONS: Load Lock Transfer Meteorology Lithography Physical Vapor Deposition PVD Process Physical Vapor Deposition PVD Pre-clean Rapid Thermal Anneal RTA Strip/Ashing Etching Implant Source High-Density Plasma Chemical Vapor Deposition HDP CVD Rapid Thermal Processing RTP Sub-Atmospheric Chemical Vapor Deposition SACVD Tungsten Chemical Vapor Deposition WCVD Modified Chemical-Vapor Deposition MCVD Plasma-Enhanced Chemical Vapor Deposition PECVD Low Pressure Chemical Vapor Deposition LPCVD

Condition: New



Product Number: P1011390



Price: $24,518.25


Regular Price: $32,691.00



Edwards iXH 610 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC110A121100
In Stock: 1
Expecting: 1
Arrival: 1 on 2021-11-20


Edwards iXH 610 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. Edwards Part Number AC110A121100 The Edwards iXH 610 is a new range of dry pumps built for green manufacturing and the processing of harsh chemical processes. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pumps, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXH will deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes especially with HARSH Chemicals. The Edwards iXH 610 Series Pumps are compact and of light-weight design, combined with exceptionally low noise and vibration, makes iXH the most versatile chemical dry pump in the Edwards range. iXH will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact. iXH pumps are designed for use in most semiconductor processes while delivering significant reductions in input power. For complete Instruction Manual see Downloads to the side. FEATURES and BENEFITS: Primarily for HARSH Chemical Applications Peak Pumping Speed 665 m3/h-1 (391 CFM) Ultimate Pressure 3.7 X 10-3 Torr No preventative maintenance required 3/8 inch Quick Connect Water Fillings Water & Power Connection Mating Halves SS Water Cooling System Multi Mode 44 slm Gas Module APPLICATIONS: Load Lock Transfer Meteorology Lithography Physical Vapor Deposition PVD Process Physical Vapor Deposition PVD Pre-clean Rapid Thermal Anneal RTA Strip/Ashing Etching Implant Source High-Density Plasma Chemical Vapor Deposition HDP CVD Rapid Thermal Processing RTP Sub-Atmospheric Chemical Vapor Deposition SACVD Tungsten Chemical Vapor Deposition WCVD Modified Chemical-Vapor Deposition MCVD Plasma-Enhanced Chemical Vapor Deposition PECVD Low Pressure Chemical Vapor Deposition LPCVD

Condition: New



Product Number: P1011379



Price: $32,557.50


Regular Price: $43,410.00



Edwards iXH 1210H HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC3A0A122200
Out of Stock


Edwards iXH 1210H HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. Edwards Part Number AC3A0A122200 The Edwards iXH 1210H is a new range of dry pumps built for green manufacturing and the processing of harsh chemical processes. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pumps, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXH will deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes especially with HARSH Chemicals. The Edwards iXH 1210H Series Pumps are compact and of light-weight design, combined with exceptionally low noise and vibration, makes iXH the most versatile chemical dry pump in the Edwards range. iXH will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact. iXH pumps are designed for use in most semiconductor processes while delivering significant reductions in input power. For complete Instruction Manual see Downloads to the side. FEATURES and BENEFITS: Primarily for HARSH Chemical Applications Peak Pumping Speed 1025 m3/h-1 (603 CFM) Ultimate Pressure 5.0 X 10-3 Torr No preventative maintenance required 3/8 inch Quick Connect Water Fillings Water & Power Connection Mating Halves SS Water Cooling System Multi Mode 44 slm Gas Module APPLICATIONS: Load Lock Transfer Meteorology Lithography Physical Vapor Deposition PVD Process Physical Vapor Deposition PVD Pre-clean Rapid Thermal Anneal RTA Strip/Ashing Etching Implant Source High-Density Plasma Chemical Vapor Deposition HDP CVD Rapid Thermal Processing RTP Sub-Atmospheric Chemical Vapor Deposition SACVD Tungsten Chemical Vapor Deposition WCVD Modified Chemical-Vapor Deposition MCVD Plasma-Enhanced Chemical Vapor Deposition PECVD Low Pressure Chemical Vapor Deposition LPCVD

Condition: New



Product Number: P1011393



Price: $36,576.75


Regular Price: $48,769.00



Edwards iXH 1220H HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC3B0A122200
Out of Stock


Edwards iXH 1220H HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. Edwards Part Number AC3B0A122200 The Edwards iXH 1220H is a new range of dry pumps built for green manufacturing and the processing of harsh chemical processes. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pumps, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXH will deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes especially with HARSH Chemicals. The Edwards iXH 1220H Series Pumps are compact and of light-weight design, combined with exceptionally low noise and vibration, makes iXH the most versatile chemical dry pump in the Edwards range. iXH will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact. iXH pumps are designed for use in most semiconductor processes while delivering significant reductions in input power. For complete Instruction Manual see Downloads to the side. FEATURES and BENEFITS: Primarily for HARSH Chemical Applications Peak Pumping Speed 1200 m3/h-1 (645 CFM) Ultimate Pressure 3.7 X 10-3 Torr No preventative maintenance required 3/8 inch Quick Connect Water Fillings Water & Power Connection Mating Halves SS Water Cooling System Multi Mode 44 slm Gas Module APPLICATIONS: Load Lock Transfer Meteorology Lithography Physical Vapor Deposition PVD Process Physical Vapor Deposition PVD Pre-clean Rapid Thermal Anneal RTA Strip/Ashing Etching Implant Source High-Density Plasma Chemical Vapor Deposition HDP CVD Rapid Thermal Processing RTP Sub-Atmospheric Chemical Vapor Deposition SACVD Tungsten Chemical Vapor Deposition WCVD Modified Chemical-Vapor Deposition MCVD Plasma-Enhanced Chemical Vapor Deposition PECVD Low Pressure Chemical Vapor Deposition LPCVD

Condition: New



Product Number: P1011397



Price: $43,007.25


Regular Price: $57,343.00



Ideal Vacuum Logo Water Mark
CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com