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Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC010A121000

Print Version
Condition:
  New
Part Number:
  P1011390
Warranty:
  Full Manufacturer's Warranty

Out of Stock  

$34,326.00

On Sale: $25,744.50

Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph. PN AC010A121000 25744.5
Expecting:   17
Anticipated Arrival:  3 on 2022-07-07
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Description

Edwards iXH 100 HARSH Dry Vacuum Pump 200-230 VAC 50/60 hz 3 ph.
Edwards Part Number AC010A121000


The Edwards iXH 100 is a new range of dry pumps built for green manufacturing and the processing of harsh chemical processes. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pumps, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXH will deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes especially with HARSH Chemicals.

The Edwards iXH 100 Series Pumps are compact and of light-weight design, combined with exceptionally low noise and vibration, makes iXH the most versatile chemical dry pump in the Edwards range. iXH will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact. iXH pumps are designed for use in most semiconductor processes while delivering significant reductions in input power. This model DOES NOT have a booster blower pump for added performance. For complete Instruction Manual see Downloads to the side.

FEATURES and BENEFITS:
  • Primarily for HARSH Chemical Applications
  • Peak Pumping Speed 100 m3/h-1 (59 CFM)
  • Ultimate Pressure 1.5 X 10-2 Torr
  • No preventative maintenance required
  • Contains Primary Pump Only
  • 3/8 inch Quick Connect Water Fillings
  • Water & Power Connection Mating Halves
  • SS Water Cooling System
  • Multi Mode 44 slm Gas Module

APPLICATIONS:
  • Load Lock
  • Transfer
  • Meteorology
  • Lithography
  • Physical Vapor Deposition PVD Process
  • Physical Vapor Deposition PVD Pre-clean
  • Rapid Thermal Anneal RTA
  • Strip/Ashing
  • Etching
  • Implant Source
  • High-Density Plasma Chemical Vapor Deposition HDP CVD
  • Rapid Thermal Processing RTP
  • Sub-Atmospheric Chemical Vapor Deposition SACVD
  • Tungsten Chemical Vapor Deposition WCVD
  • Modified Chemical-Vapor Deposition MCVD
  • Plasma-Enhanced Chemical Vapor Deposition PECVD
  • Low Pressure Chemical Vapor Deposition LPCVD

Brochure

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CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



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