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Edwards iGX100L 干式真空泵,62 CFM 200-230V 50/60Hz,3.75 mtorr。部件号 A54610958

印刷版
健康)状况:
  新的
零件号:
  P107091
保修单:
  爱德华兹保修

缺货   

NT$846,097.20

在 销售: NT$592,268.04

Edwards iGX100L 干式真空泵,62 CFM 200-230V 50/60Hz,3.75 mtorr。部件号 A54610958 592268.04
货币: New Taiwan Dollar (TWD)

描述

Edwards iGX100L 干式真空泵,62 CFM 200-230V 50/60Hz,3.75 mtorr。极限压力
Edwards 零件号 A54610958

Edwards iGX 干式真空泵系列为大修之间的零维护树立了新标准。效率的提高降低了拥有成本,并在整个压力范围内提供连续的泵送任务。 iGX 干泵包括以太网连接,允许通过网页查看关键数据,以及一套全面的网络选项,以确保泵的持续可用性。 iGX 泵具有多种峰值速度和型号,可满足从清洁到中型流程的应用需求。模块化设计允许用户配置 iGX 干泵以满足个别晶圆厂的要求。超紧凑的占地面积允许安装选项,包括工具上安装、近距离安装或远程安装。如需了解更多规格和选项,请向下滚动至“可用下载”并下载 datasheet.pdf。这些 Edwards iGX100L 干式半导体真空泵是新款,Edwards 部件号为 A546-10-958 (A54610958)。


宣传册

Ordering/Models for the iGX Series:
  • iGX100L 200 - 230V 50/60Hz A54610958
  • iGX100L 380 - 460V 50/60Hz A54610959
  • iGX100N 200 - 230V 50/60Hz A54611958
  • iGX100N 380 - 460V 50/60Hz A54611959
  • iGX100M 200 - 230V 50/60Hz A54612958
  • iGX100M 380 - 460V 50/60Hz A54612959
  • iGX600L 200 - 230V 50/60Hz A54630958
  • iGX600L 380 - 460V 50/60Hz A54630959
  • iGX600N 200 - 230V 50/60Hz A54631958
  • iGX600N 380 - 460V 50/60Hz A54631959
  • iGX1000M 200 - 230V 50/60Hz A54632958
  • iGX1000M 380 - 460V 50/60Hz A54632959
  • iGX1000N 200 - 230V 50/60Hz A54681958
  • iGX1000N 380 - 460V 50/60Hz A54681959
  • iGX100MTI 200 - 230V 50/60Hz A54648958


TECHNOLOGY:
  • Lower Utilities Costs. Typically a 40% saving can be made on utilities costs over an entire fab. Based on a 300mm fab in the US, containing 200 tools, 537 pumps 70% GX pumps, 30% iH pumps
  • iGX fitted with constant flow water valve
  • Designed for Energy Efficiency
  • High performance motors and inverter drives
  • Low operating power consumption
  • Lower power standby mode using Active Utility Control (AUC)
  • Nitrogen dilution can be tuned to the application requirement
  • Minimizes gas usage
  • Highly efficient cooling
  • High conductivity materials and good design enables low water flow
  • Precision ceramic bearings
  • Very high load capability for reliability
  • Low noise and vibration
  • Ethernet Connectivity

  • The GX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:
  • Operating status
  • Key parameters
  • Parameter setpoints
  • Alert summary


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联系我们
Ideal Vacuum Products , LLC
5910 Midway Park Blvd NE
Albuquerque, 新墨西哥 87109-5805 USA

电话: (505) 872-0037
传真: (505) 872-9001
info@idealvac.com



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