The Granville-Phillips Micro-Ion ATM module combines proven
Micro-Ion ionization gauge technology with a miniature Conductron
heat loss sensor and two Piezo resistive sensors to provide accurate,
continuous pressure measurement from high vacuum to atmosphere.
Using its diaphragm sensors, this product is capable of providing accurate absolute
pressure up to atmosphere along with precision indication of vacuum chamber differential
pressure from ambient. The unique sensor design eliminates thermal effects that can
influence the performance of the heat loss sensor at higher pressures. This small module
combines all four sensors and control electronics in a compact modular design, reducing
the number of gauges required on a chamber and minimizing the required space.
The full range pressure measurement is output as a single analog signal or available
through optional serial RS-485 or DeviceNet digital interfaces. The RS-485 and
DeviceNet versions have up to three optional setpoint relays can be configured for process
control, with the ability to assign the relays at any pressure across the vacuum pressure
range or to a specific differential pressure value.