CMP ELITE Z is a full synthetic hydrocarbon fluid which are double-distilled through a molecular distillation process. They have very low pour points to eliminate cold start problems and a very high viscosity index providing exceptional resistance to higher temperatures seen in many high rpm rotary vane pumps.
Their molecular structures are unique and provide excellent chemical inertness and high temperature stability. CMP E-Z ELITE mechanical pump fluids have a much higher molecular weight than petroleum oils and exhibit greatly reduced backstreaming tendencies.
CMP ELITE synthetic fluids are miscible with hydrocarbon oils and do not require any special cleaning procedures before use.
CMP ELITE Z Synthetic can be used in all types of rotary vane pumps.
Plus can be used for Agilent Varian VSMR151, VSBR151, VSPR021, 959, 948, 936, 979, and other Helium Leak Detectors.
Typical applications include: Instrumentation, LPCVP, nitride deposition, ion implantation, plasma etching, sputtering and biomedical processes.
CAUTION: These products are not non-flammable and should not be used in applications where there is risk of explosion from high oxygen enriched environments.