Agilent Varian HS-20 Vacuum Diffusion Pump, 20 in. ASA, 27.5 in. OD, Std. Cold Cap, 17,500 l/s, 240V
NEW Agilent Varian HS-20 High Vacuum Diffusion Pump with Standard Cold Cap, 17,500 L/S Pumping Speed
20 Inch ASA Inlet, 27.5 in OD (20 Bolt) 4 Inch ASA Exhaust (8 bolt), 3-Phase 240 VAC, Part Number 84341308.

These Agilent Varian High Throughput models include the series HS-16, HS-20, HS-32 and NHS-35. This is the HS-20 diffusion high throughput vacuum pump. They are the primary industrial standard for high vacuum pumping mechanisms. The Agilent Varian HS-20 diffusion pumps have a high pumping speed for all gases and low cost per unit pumping speed when compared with other types of pumps used in the same vacuum range. The full fractionating design allows vaporized fluid to be fractionated in the boiler and jet assembly. Contamination and decomposition products are pumped away and only the purest vapor reaches the top jet, assuring highest speed and lowest backstreaming. The vacuum fluid heater is mounted at the bottom of the pump body. The HS pumps have a fill and drain assembly for easy maintenance of pump fluid and continuous monitoring with thermal protection switches. Finned boilers increase the surface area which prolongs fluid life. The inlet is at the top, and the exhaust is through the foreline.

Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the exhaust. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high vacuum range (down to 10-9 Torr), diffusion pumps today can produce pressures approaching 10-10 Torr when properly used with modern fluids and accessories. The features that make the diffusion pump attractive for high and ultra-high vacuum use are its high pumping speed for all gases and low cost per unit pumping speed when compared with other types of pump used in the same vacuum pressure range. Diffusion pumps have no motors and use only heaters to produce a vacuum. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump is typically used to maintain an outlet pressure around 1 mTorr.

These Agilent Varian model HS-20 high vacuum, high throughput diffusion pumps are new and can be ordered with either a 3-phase 240, 415 or 480 VAC heaters. With a standard cold cap or halo baffle. When ordering please specify which voltage or cap your application will require. We stock and sell diffusion pumps oils, e.g. IVP 704 diffusion pump fluids along with vacuum fittings, adapters, and replacement parts for your Agilent Varian HS-20 diffusion pumps. This pump uses IVP 704 diffusion pump fluid and is designed for high vacuum and fast pumping of large volumes of gas or vapor in production operations. For HS-20 Instruction Manual scroll down to manuals tab AVAILABLE DOWNLOADS: and download the PDF.

Highlights For This Agilent Varian HS-20 Diffusion Pump
  • 20 Inch ASA Inlet Flange (20 bolt holes) 27.5 in. OD, hole size 1.25 in.
  • ASA 4 in Outlet Flange (8 bolt holes) 9" OD, hole size 13/16 in.
  • Recommended Roughing Backing Pump: ≥100 CFM
  • Standard Cold Cap
  • Maximum Pumping Speed 17,500 l/s air, 22,000 l/s helium
  • 240 VAC @ 2000 Watt Heater (6 required)
  • Designed To Be Used With IVP 704 Diffusion Pump Oil (5 Quarts)

Included with ASA Pumps:
One Inlet Flange O-ring84349002
One Foreline Flange O-ring660893432
Two 1/2" Hose 3/8 Pipe Barbed Connectors624301111
Four 3/8" Hose 3/8 Pipe Barbed Connectors624301110
Installation and Operation Manual699901140

ITEM DESCRIPTION PART NO.
1 Standard Cold Cap Assembly - Includes 10-32 SST Rd Hd screw & 10-32 SST Hex nut 84358301
1 Water-Cooled Halo Baffle K1855320
2 Cold Cap Water Connection:
Cold Cap Gasket/Grommet (Kit of 4)L8839301
Cold Cap Nut & Followers KitL8840301
3 Jet Assembly 84350301
4 Jet Coupling L6367301
5 Foreline Baffle Assembly 84889301
6 Sight Glass Service Kit for Pumps Built Before October 1995:
3 Glass TubesF1755008
2 Brass Union 1/4 OD x 1/4 MPT622568108
2 Brass Elbow 69FL 6x4, 169VL6-4623451012
8 O-ring, Viton, Parker No. 2-011660892011
8 O-ring, Viton, Parker No. 2-111660892111
3 O-ring, Viton, Parker No. 2-221660892221
3 O-ring, Viton, Parker No. 2-213660892213
F6097301
6 Sight Glass for Pumps Built After October 1995 L9223001
7 Threaded Plug, Fill & Drain 77261001
8 Upper Thermal Switch, Temperature Setting 185°F K9050001
9 Lower Thermal Switch, Temperature Setting 390°F K9050002
10 Heater Nickel Wire 80 Inches, 14 AWG (2 per heater required) X3900-68006
10 Dalton Heater Wire 120 inches, 10 AWG (2 per heater required) X3900-68000
10b Heater Wiring Connection Box
Nickel Lug for No. 14 AWG 648056329
11 Heaters (six heaters required per pump)
200 V / 2000 watt Heater Element With Leads647320025
240 V or 415V / 2000 watt Heater Element With Leads647320020
240 V or 415V / 2000 watt Heater Element No Leads for pumps
built before May '90
647320060
400 V / 2000 watt Heater Element With Leads647320035
430 V / 2000 watt Heater Element With Leads647320040
440 V / 2000 watt Heater Element With Leads647320045
480 V / 2000 watt Heater Element With Leads647320030
480 V / 2000 watt Heater Element No Leads for pumps built
before May '90
647320070
12 Heater Crush Plate, replace with each heater K7108001
13 Heater Clamping Plate K7107001
14 Heaters Insulation, Cerablanket 0.50" Thick L6514001
15 Heater Cover Plate 84497001
O-Ring Kit includes:
1 Butyl O-ring for ASA Inlet Flange84349002
1 O-ring for Foreline Flange660893432
8 Fill and Drain O-rings, Viton Parker 2-213660892213
4 O-rings, Viton Parker 2-221660892221
1 Sight Glass O-ring660892240
1 Graphite Sight glass GasketL9228001
K0377165
16 Butly Centering Ring for ASA Inlet Flange 84349002
17 Centering Ring for ASA Foreline Flange 660893432
17 Centering Ring for ISO Foreline Flange, 160K IC160SV
Included with ASA pumps:
16 One O-ring for ASA Inlet Flange84349002
17 One O-ring for ASA Foreline Flange 660893432
18 Two Water Coupling for Cold Cap622445026
Two 1/2" Hose 3/8 Pipe Barbed Connectors624301111
Four 3/8" Hose 3/8 Pipe Barbed Connectors624301110
Installation and Operation Manual699901140
DC-702 diffusion pump fluid, one gallon 695472008
DC-704 diffusion pump fluid, one gallon 695474008
DC-705 diffusion pump fluid, one gallon 695475008
Product: Agilent Varian HS-20 Vacuum Diffusion Pump, 20 in. ASA, 27.5 in. OD, Std. Cold Cap, 17,500 l/s, 240V
Condition:      New
Warranty:     As-Stated*
Part Number: P106875
Sale Price: $21,871.16       Regular Price: $25,730.78