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Edwards QDP40 iQDP40 Semiconductor Vacuum Pump Motor Water Cooled, 2.2 kW D9OI C, A07113770
In Stock: 1


This is a motor for the Drypumping System microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. i/QDP pumps have enclosed, water-cooled motors and are therefore suitable for applications in clean environments where fan cooling is unacceptable.The pump-motor is cooled by water flowing through a cooling jacket which surrounds the motor. The pump-motor cooling circuit is separate from the pump cooling circuit. The cooling-water supply and return pipelines are connected to the pump by connectors on the water services panel at one end of the pump. The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems including pump and motor temperature, by way of integrated sensors. Three motor-protection thermistors are fitted to the pump-motor (one on each winding). These thermistors are solid-state devices which have an electrical resistance of 100 to 500 Ohms at normal pump-motor operational temperature. When the pump-motor is too hot, the electrical resistance rises quickly to 3000 Ohms. The thermistors are connected in series and you can use the output of the thermistors to shut down the pump because the motor is too hot. These motors are supplied configured for ‘low voltage’ operation (200-208 V at 50 Hz or 200-230 V at 60 Hz). To change the QDP80 Pump-motor to ‘high voltage’ operation, remove the pump-motor terminal-box cover, then remove the wires from the U1, V1 and W1 terminals. Reconnect the wires to the W2, U2 and V2 terminals, as per p.22 of the Edwards DRYSTAR QDP-40 IQDP-40 Operating Instructions (see downloads, at left).

Condition: New



Product Number: P108789



Price: $2,093.13



Edwards QDP80 iQDP80 Semiconductor Vacuum Pump Motor Water Cooled, 6 kW D9OI C, A07115770
In Stock: 1


This is a motor for the Drypumping System microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. i/QDP pumps have enclosed, water-cooled motors and are therefore suitable for applications in clean environments where fan cooling is unacceptable.The pump-motor is cooled by water flowing through a cooling jacket which surrounds the motor. The pump-motor cooling circuit is separate from the pump cooling circuit. The cooling-water supply and return pipelines are connected to the pump by connectors on the water services panel at one end of the pump. The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems including pump and motor temperature, by way of integrated sensors. Three motor-protection thermistors are fitted to the pump-motor (one on each winding). These thermistors are solid-state devices which have an electrical resistance of 100 to 500 Ohms at normal pump-motor operational temperature. When the pump-motor is too hot, the electrical resistance rises quickly to 3000 Ohms. The thermistors are connected in series and you can use the output of the thermistors to shut down the pump because the motor is too hot. These motors are supplied configured for ‘low voltage’ operation (200-208 V at 50 Hz or 200-230 V at 60 Hz). To change the i/QDP80 Pump-motor to ‘high voltage’ operation, remove the pump-motor terminal-box cover, then remove the wires from the U1, V1 and W1 terminals.

Condition: New



Product Number: P109569



Price: $2,221.08



BOC Edwards iQDP40 Dry Semiconductor DryStar Vacuum Pump Rebuilt
In Stock: 2


The iQDP40 Dry pumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools.

Condition: Rebuilt



Product Number: P101403



Price: $8,995.00



BOC Edwards iQDP40 Dry Semiconductor DryStar Vacuum Pump with iQMB-250 Booster Rebuilt
Out of Stock


The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools.

Condition: Rebuilt



Product Number: P101402



Price: $11,495.00



BOC Edwards iQDP80 Dry Semiconductor DryStar Vacuum Pump Rebuilt
In Stock: 1


The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools.

Condition: Rebuilt



Product Number: P101404



Price: $11,495.00



BOC Edwards iQDP80 Dry Semiconductor DryStar Vacuum Pump with iQMB-250 Booster Rebuilt
Out of Stock


The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools.

Condition: Rebuilt



Product Number: P102695



Price: $11,995.00



BOC Edwards iQDP80 Dry Semiconductor DryStar Vacuum Pump with iQMB-500 Booster Rebuilt
In Stock: 1


The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools.

Condition: Rebuilt



Product Number: P101405



Price: $13,195.00



BOC Edwards iQDP80 Dry Semiconductor DryStar® Vacuum Pump with iQMB-1200 Booster Rebuilt
Out of Stock


The iQDP80 with iQMB-1200 Booster is the perfect combination for subfab semiconductor and solar cell panel manufacture. This iQ series combo has proven performance and high reliability in the most demanding applications. Patented rotor arrangement gives high volumetric efficiency with low power input. Short, simple gas path maximizes internal conductance and minimizes dead space. No inter-coolers needed. Low operation costs and the consumables are virtually eliminated. Safer gas handling. Clean vacuum with no backstreaming. Designed for low maintenance and intrinsically non polluting. These features make the Drystar® pumps ideal for: subfab semiconductor processing, solar cell panel manufacturing, clean applications in freeze drying, vacuum deposition and special R&D, load lock chambers, vacuum furnaces and many chemical processes.

Condition: Rebuilt



Product Number: P102694



Price: $15,195.00



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Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com