Skip to main content
× Home Services Products Catalogs Downloads TechSupport About Contact Careers (505) 872-0037

(505) 872-0037

Shopping Cart Icon
Cart
 
Login Icon
Login
Language Selector
en-us
×
Americas
Europe
Middle East & Africa
Asia Pacific & Japan
Agilent IDP-10 Dry Scroll Vacuum Pumps On Sale Edwards nXR Multi Stage Roots Pumps On Sale Pfeiffer ASM340 Leak Detectors On Sale Agilent TriScroll Pumps On Sale Ideal Vacuum XG-120 Digital Thermocouple Gauges On Sale Agilent IDP-15 Dry Scroll Vacuum Pumps On Sale

Keyword       Part Number:      

× Vacuum Pumps Modular Vacuum Chambers Stainless Steel Vacuum Chambers Aluminum Vacuum Chambers ExploraVAC Unlimited Chambers ExploraVAC Vacuum Chambers Fittings and Flanges Feedthroughs Vacuum Valves Rebuild Kits, Parts, And Motors Vacuum Fluids, Oils, and Greases Turbo Pumps And Controllers Filters Traps and Silencers Convection and Vacuum Ovens Leak Detection and RGA Vacuum Pressure Measurement Recirculating Chillers And Water Baths
×

Load

Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump 208 VAC 3PH. 3/8 in. Water Connector ISO 63 Inlet. Part Number A41943012 - Without TIM
Out of Stock
Expecting 1
Anticipated Arrival 1 on 2024-12-06


Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump ISO 63 Inlet 208 VAC 3PH. PN A41943012 The compact EPX180LE without Tool Interface Module (TIM) high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180LE is capable of pumping from atmosphere to ultimate pressures of less than 7 x 10-5 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. The EPX 180LE is a good replacement option for the discontinued EPX 180NE model, part number A41944012. The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. The EPX LE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump. The EPX pump is compatible with Fabworks 32. The EPX has four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘LE’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. Download an Instruction Manual to the side.

Condition: New



Part Number: P102978



Price: $23,409.12


Regular Price: $29,261.40




Currency: US Dollar (USD)

Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump 400 VAC 3PH. 3/8 in. Water Connector ISO 63 Inlet - Part Number A41943014 - Without TIM
Out of Stock


Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump ISO 63 Inlet 400 VAC 3PH. PN A41943014 The compact EPX180LE without Tool Interface Module (TIM) high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180LE is capable of pumping from atmosphere to ultimate pressures of less than 7 x 10-5 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. The EPX LE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump. The EPX pump is compatible with Fabworks 32. The EPX has four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘LE’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. Download an Instruction Manual to the side.

Condition: New



Part Number: P1011666



Price: $23,409.12


Regular Price: $29,261.40




Currency: US Dollar (USD)

Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump 208 VAC 3PH. 3/8 in. Water Connector ISO 63 Inlet - Part Number A41943712 - With MCM TIM
Out of Stock
Anticipated Arrival 1 on 2025-01-06


Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump ISO 63 Inlet 208 VAC 3PH. PN A41943712 The compact EPX180LE WITH Tool Interface Module (TIM) high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180LE is capable of pumping from atmosphere to ultimate pressures of less than 7 x 10-5 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. The EPX LE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump. The EPX pump is compatible with Fabworks 32. The EPX has four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘LE’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. Download an Instruction Manual to the side.

Condition: New



Part Number: P1011667



Price: $23,588.88


Regular Price: $29,486.10




Currency: US Dollar (USD)

Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump 400 VAC 3PH. 3/8 in. Water Connector ISO 63 Inlet. Part Number A41943714 - With MCM TIM
Out of Stock


Edwards EPX 180LE High Vacuum Primary Dry Vacuum Pump ISO 63 Inlet 400 VAC 3PH. PN A41943714 The new compact EPX180LE WITH Tool Interface Module (TIM) high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180LE is capable of pumping from atmosphere to ultimate pressures of less than 7 x 10-5 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. The EPX 180LE is a good replacement option for the discontinued EPX 180NE model, part number A41944712, also for the discontinued part number A41944714. The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. The EPX LE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump. The EPX pump is compatible with Fabworks 32. The EPX has four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘LE’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. Download an Instruction Manual to the side.

Condition: New



Part Number: P1011668



Price: $23,588.88


Regular Price: $29,486.10




Currency: US Dollar (USD)

NEW Edwards EPX 500LE High Vacuum Primary Dry Vacuum Pump 208 VAC 3PH. 3/8 in. Water Connector ISO 160 Inlet - Part Number A41953012 - Without TIM
In Stock
1


NEW Edwards EPX 500LE High Vacuum Primary Dry Vacuum Pump ISO 160 Inlet 208 VAC 3PH. PN A41943012 The new compact EPX500LE without Tool Interface Module (TIM) high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500LE is capable of pumping from atmosphere to ultimate pressures of less than 7 x 10-7 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. The EPX LE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump. The EPX pump is compatible with Fabworks 32. The EPX has four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘LE’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. Download an Instruction Manual to the side.

Condition: New



Part Number: P102980



Price: $32,412.24


Regular Price: $40,515.30



Currency: US Dollar (USD)

NEW Edwards EPX 500LE High Vacuum Primary Dry Vacuum Pump 208 VAC 3PH. 3/8 in. Water Connector ISO 160 Inlet - Part Number A41953712 - With MCM TIM
Out of Stock
Anticipated Arrival 1 on 2024-11-06


NEW Edwards EPX 500LE High Vacuum Primary Dry Vacuum Pump ISO 160 Inlet 208 VAC 3PH. PN A41953712 The new compact EPX500LE WITH Tool Interface Module (TIM) high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500LE is capable of pumping from atmosphere to ultimate pressures of less than 7 x 10-7 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. The EPX LE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump. The EPX pump is compatible with Fabworks 32. The EPX has four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘LE’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. Download an Instruction Manual to the side.

Condition: New



Part Number: P1011671



Price: $32,592.00


Regular Price: $40,740.00



Currency: US Dollar (USD)

NEW Edwards EPX 500LE High Vacuum Primary Dry Vacuum Pump 400 VAC 3PH. 3/8 in. Water Connector ISO 160 Inlet - Part Number A41953714 - With MCM TIM
Out of Stock


NEW Edwards EPX 500LE High Vacuum Primary Dry Vacuum Pump ISO 160 Inlet 400 VAC 3PH. PN A41953714 The new compact EPX500LE WITH Tool Interface Module (TIM) high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500LE is capable of pumping from atmosphere to ultimate pressures of less than 7 x 10-7 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. The EPX LE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump. The EPX pump is compatible with Fabworks 32. The EPX has four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘LE’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. Download an Instruction Manual to the side.

Condition: New



Part Number: P1011672



Price: $32,592.00


Regular Price: $40,740.00



Currency: US Dollar (USD)
Marca de agua con el logotipo de Ideal Vacuum
CONTACT US
Ideal Vacuum Products , LLC
5910 Midway Park Blvd NE
Albuquerque, New Mexico 87109-5805 USA

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com