Edwards nEXT85D Turbo Vacuum Pump, ISO-K 63 Inlet, 84 l/s Pumping Speed, Air or Water Cooled. Edwards Part Number: B8G210B01. Edwards nEXT85D turbomolecular high vacuum pumps have a pumping speed of 84 liters per second (l/s) and an ultimate pressure of 8 x 10-8 mbar (6 x 10-8 Torr). This nEXT85D pump has an ISO-K 63 inlet flange, included inlet screen, and an ISO KF-16 exhaust foreline flange. The nEXT85D series turbo pumps require 24 to 48 VDC input power at a maximum of 120 Watts (normal operation is typically less than 80 Watts). All nEXT85D turbo pumps have a compact onboard controller with RS232, RS485, & USB interfaces, five status LED’s, and an accessory port to control either an air-cooling fan or a solenoid vent valve ( a "Y" connector is available for connecting both a fan and valve). All that is needed is a suitable power supply and start/stop logic. For laboratory use we recommend the Edwards Turbo Instrument Controller (TIC) or the Turbo Active Gauge (TAG) which can both act as a power supply and remote controller for the smaller sized nEXT pumps. We offer a variety of optional accessories, including TIC and TAG controllers, forced air- & water-cooling kits, and solenoid operated vent valves. This nEXT85D turbo pump has Edwards part number B8G210B01.Edwards nEXT85D Turbo Pump Specifications: Part Number: B8G210B01 Inlet Flange: ISO-K 63 Base Pressure: 8 x 10-8 mbar (6 x 10-8 Torr) Operating Speed: 90,000 RPM Operating Position: From horizontal to vertical (inlet up) Pumping Speed: 84 l/s Cooling: Forced Air or Water Exhaust Flange: KF-16 Operating Voltage: 24-48 VDC Maximum Power: 120 Watts (typical operation < 80 Watts) Power and Communication: DB15 serial RS232/RS485 interface, USB One accessory port Recommended Roughing Pump: nXDS6i The nEXT turbo pumps have a rotor designed to optimize pump performance while maintaining high levels of reliability. The "D" variant of nEXT turbo pumps have both turbomolecular and drag stages for improved tolerance to higher backing line pressures, and have superior pumping speed and compression across all gas species. In addition to enhanced performance, nEXT85D turbo pumps have field serviceable oil cartridges and shaft bearings which dramatically decrease downtime. nEXT D turbo pumps benefit from a compact onboard controller which has drive electronics for controlling pump operation and standby speed, and operating solenoid vent valves (TAV5, TAV6) and air-cooling units (via the 24 VDC accessory port). The integral controller has a DB15 interface for RS232 and RS485 serial communications and for supplying pump power. The USB port allows the use of Edwards nST2 PC software (free download below). The controller also has five indicator LED’s which signal the general status, operation, and service status of the pump. The optional TIC turbo instrument controller, or TAG turbo and active gauge controller can both power and control the pump. Edwards nEXT pumps with a CF flange are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10-10 Torr range (if all-metal intake seal gaskets are used and the vacuum chamber is completely cleaned and baked out). Turbo pumps with ISO flanges are limited (by permeation and outgassing of the rubber/elastomer O-ring seals) to an ultimate pressure in the 10-8 Torr range. The intake of Conflat flanged nEXT85D pumps can be baked up to 120 °C when the turbo is water cooled. Heater bands for the Conflat pumps are sold separately. For vacuum system integration applications, the nEXT85D pump can be powered by a suitable user supplied 24 to 48 VDC power source. For laboratory applications we recommend the Edwards TIC turbo instrument controller or the TAG turbo & active gauge controller, either of which can both supply power and control the pump. The TIC series of controllers are bench top or rack mountable remote user interface/power sources, which communicate with the Edwards nEXT series pumps through RS232/RS485 and provide full monitoring and control of the turbo pump, and optionally for one or more vacuum gauge instruments. When an Edwards relay box is added, it becomes the control interface between the TIC controller and the mains backing pump, turbo pump flange heater band, and a backing line isolation valve. The TAG turbo and active gauge controller can power nEXT85D turbo pumps and a vacuum gauge, and its large LED display can show pump speed or vacuum pressure. The pump instruction manual and Edwards nEXT pump product brochures are available in the downloads section. Typical Turbo Pump Applications include: General clean pumping applications Scanning Electron Microscopes - SEM Beam lines and high energy physics Mass Spectrometry Electron Microscopy Sample Preparation Research and Development High Energy Physics Industrial Semiconductor Coatings Surface Science Instruments

Edwards TAG Turbo and Active Gauge Controller Kit with 200W External 24 VDC Power Supply and AC Power Cord for nEXT Turbo Pumps. This Edwards TAG Turbo and Active Gauge Controller Kit includes the TAG controller, the matching 200W power supply, and a 2 meter long, US plug 5-15P to C13 Connector, IEC 60320 input power cord for the power supply. The TAG is a small, low cost, 24 VDC pumping system controller, suitable for a wide range of vacuum applications. The TAG provides a serial interface for displaying the turbo pump’s speed and can power nEXT85D, nEXT240D, nEXT300D, or nEXT400D turbo pumps. The TAG can also control and display vacuum pressure of a single active gauge, and run a fan for forced air cooling of the pump. The TAG controller is compatible with all nEXT turbo pumps and APG, AIM, ASG, or WRG vacuum gauges. The TAG’s push button interface allows the user to easily switch between between pump speed or vacuum pressure, shown on the large LED display. This compact 24 VDC controller is ideal for use on benchtops and is also well suited for mobile platforms where space is limited, yet functionality and reliability are essential. This TAG Controller Kit includes: Edwards TAG Turbo and Active Gauge Controller, PN: D39592000 Edwards 200W External Power Supply for TAG Controller, PN: D39592800 AC Power Cord, 2 Meters Long, 115 VAC, US Plug 5-15P to C13, PN: P106129

Edwards ACX85 Combination Axial / Radial Forced Air Cooling Kit for nEXT85D Turbo Pumps. Edwards Part Number: B8G200820. This Edwards ACX85 forced air cooling kit is specifically designed for nEXT85D series turbo pumps which require either forced air or water cooling. The ACX85 forced air cooling kit is specifically designed for nEXT85D turbo pumps. This kit can be either Axially or Radially mounted and has a 0.3 meter long power cable terminated with an accessory port connector. The fan plugs into the pump’s accessory port and is powered by the pump. This kit includes all the necessary hardware to mount the fan in either orientation. When mounted axially, the fan unit mounts to the bottom of the pump and provides forced air flow colinear to the pump’s shaft. When mounted radially, the fan unit mounts to the side of, and provides forced air flow perpendicular to, the pump. This Edwards combination axial/radial forced air cooling kit has part number B8G200820. This combination Axial/Radial fan kit fits: nEXT85D Turbo Pumps

Edwards WCX85 Water Cooling Kit for nEXT85D Turbo Pumps. Edwards Part Number: B8G200833. This Edwards water cooling unit fits the nEXT85D turbo pump. It attaches to the side of the pump with two included bolts. This water cooling block has push-fit connectors for the supply and discharge hoses (6mm OD plastic hose). The hose connections may be unscrewed and removed to make use of the integrated G 1/8” threads. This water cooling kit is needed when using a flange heater band with a CF flanged pump. Edwards nEXT85D pumps also benefit from water cooling when there are high gas throughputs, cyclic operations and/or high ambient temperatures. In order to ensure long trouble-free operation, the cooling water must be clean and not contain any oils, greases or suspended solids. This water cooling kit has Edwards part number B8G200833. This water cooling unit fits: nEXT85D turbo pumps

Ideal Vacuum UltraLock High Vacuum HV Pneumatic Gate Valve ISO-F DN 63 Flange, Ball Groove Locking, Viton Seals, 304 Stainless Steel. ISO-63 Bolt Down Flange with M8 x 1.25 Threads. Includes Reed Switch Position Indicators. These Ideal Vacuum UltraLock™ pneumatically operated gate valves have an ISO-F DN 63 vacuum flange with M8 x 1.25 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. Our new UltraLock series of premium pneumatically operated vacuum gate valves are built using an innovative ball-and-groove locking mechanism which keeps the valve locked closed during loss of power or air pressure, while reducing wear and extending operating life. These UltraLock gate valves have a typical life of 300,000 cycles before needing service and are made with corrosion resistant 304 stainless-steel gates and valve bodies. An easily visible external position indicator and position sensor switches are standard on all pneumatic UltraLock gate valves.UltraLock Locking Mechanism: Our UltraLock high vacuum gate valves employ an ingenious ball-and-groove mechanism to lock the valve. Inside the valve body is a rolling carriage with lubricated ball bearings on which the gate is attached. When the valve is actuated, the carriage and gate are slid towards the vacuum port until the carriage reaches the end of the valve body. This positions the gate concentric to the port. Continued pressure on the carriage causes a set of stainless-steel balls, riding in a decreasing depth groove between the carriage and the gate, to exert outward pressure on the gate. This outward force pushes the gate into its closed position. A leak-tight seal is obtained as the outward pressure forces the gate’s O-ring seal to be pressed against the valve body’s sealing surface. It is common for these valves to achieve an extended life of 300,000 cycles before service is needed. UHV vs HV Versions: Our Conflat CF flanged gate valves are UHV rated. The bellows are welded to the bonnet plate, and oxygen-free, high-thermal conductivity (OFHC) copper sealing gaskets and flange knife-edges form the required metal-to-metal seal between the bonnet plate and valve body. Our Conflat UHV UltraLock valves have a low leak rate of < 3.75 x 10-10 Torr l/sec and are bakeable up to 200 °C with the gate open (150°C with the gate closed). Our KF and ISO-F flanged gate valves use Viton O-rings for the bellows and bonnet plate seals and are therefore limited to high-vacuum (HV) applications with ultimate pressures down to 3x10-8 Torr. KF and ISO-F series UltraLock valves have a leak rate of 1.5 x 10-9 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). Position Indicators: All of our UltraLock series of pneumatic gate valves include a visible external position indicator - the white ring conveniently mounted below the pneumatic piston. Pneumatic UltraLock gate valves also include open and closed reed sensor switches which are mounted on the valve’s pneumatic cylinder. These switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoid Valves: We offer solenoid kits for pneumatic valves in voltages of 12 VDC, 24 VDC, and 120 VAC. Solenoid kits are sold separately and include the solenoid valve, mounting bracket with fasteners used to attach the solenoid to the gate valve’s bonnet flange, and flexible 1/4” OD airlines to connect between the push-to-connect fittings on the gate valve’s pneumatic cylinder and the solenoid valve. Specifications: Our Ideal Vacuum UltraLock gate valves are designed for dependable High and Ultra- High Vacuum (UHV) applications and are often used in combination with cryo, turbo, and ion high vacuum pumps. Available sizes include Conflat CF 2.75, 4.5, 6, 8, 10, and 12 inch sizes; ISO-F DN -63, -100, -160, -200, -250, -320, -400, -500, and -630 sizes; and quick flanged sizes KF-40 and KF-50. Please see the downloads for more information.

Ideal Vacuum Cube 6 x 6 in. Gate Valve Adapter Plate Kit ISO-F 63. This is an ISO-F 63 gate valve adapter plate kit for the 6 x 6 Ideal Vacuum Cube. This adapter allows the compact connection of an ISO-F 63 gate valve (with tapped mounting holes) to an Ideal Vacuum Cube™, without additional plumbing or fittings. The adapter consists of two plates. One plate has our patented Taper-Seal™ O-ring seal and is mounted to the Cube frame. The other plate is mounted to the gate valve’s threaded flange. An ISO 63 centering ring with O-ring is sandwiched between the two plates which are then screwed together to make the seal. This adapter kit can be used to isolate a turbomolecular pump from the chamber. It creates the shortest possible pumping path for maximum high vacuum performance. Another use for the gate valve adapter kit is to join two Cubes together in load lock applications. Two adapter kits are required, one on each side of the gate valve. When two cubes are joined with a gate valve between them, one Cube can be used as an antechamber to transfer materials from ambient atmosphere into the other which remains under vacuum. Similarly, when two Cubes of differing sizes are joined with a gate valve between them, the system can be used for explosive decompression testing. Here, the larger Cube decompresses the smaller Cube. It is best to use a pneumatic gate valve since it opens more rapidly than a manually operated one. Please download the gate valve adapter kit user manual for installation instructions. Features: 6" x 6" plate size Uncoated 6061-T6 aluminum Connects ISO-F 63 gate valve to 6 x 6 Cube face Shortest possible pumping path for maximum performance No extra tubing or fittings needed Hardware included Mounts in any orientation Directly mounts to frame size: 6 x 6 x 6 6 x 6 x 12 6 x 12 x 12 6 x 6 x 6 hexagon 6 x 6 x 12 hexagon 6 x 6 x 12 octagon

ISO 63 Centering Ring Aluminum with Viton® O-Ring, NW-63 Vacuum Flange Size, Typically Used With 2.5 Inch O.D. (63.50 mm) Tubing. These ISO DN 63 centering rings are made of aluminum with durable Viton® (FPM) rubber O-rings and are used to seal both ISO-K and ISO-F vacuum flanges. These centering rings follow vacuum technology standards as described in DIN 28404 and ISO 1609. The centering ring which contains a rubber elastomeric O-ring forms the vacuum seal between the two mating ISO-K or ISO-F flange faces. ISO-K fittings are quick to assemble using claw clamps (please see figure - click to enlarge) and can be connected together in any orientation. The claw clamp hooks into a ridged groove in the back side of the ISO-K flange. ISO-F fixed flange vacuum fittings are different and have a bolt circle where bolts align the two flanges. These ISO 63 centering rings are commonly used to build process vacuum plumbing and systems for industrial standard and high vacuum applications. The ISO standard sizes for large LF flanges are ISO-F and ISO-K DN 63, 80, 100, 160, 200, 250, 320, 400, 500, 630, 800, 1000. These vacuum fittings are made with inner and outer rings of Aluminum 6082 with FPM rubber O-ring material.ISO DN 63 Centering Ring, for Sealing of NW-63 Vacuum Flanges, Aluminum with Viton® O-Ring (FPM) ISO-LF Flange Size: NW-63Common Dimensions:A = 2.75" (70.00mm) B = 0.15" (3.90mm)

Solenoid Kit for UtraLock Pneumatic Gate Valve, 110-120 VAC, Includes Mounting Hardware. This solenoid kit is for use with an Ideal Vacuum ULTRALockTM or HVA pneumatically operated gate valve. The solenoid operates the gate valve’s pneumatic piston. All fittings and connections must be leak-tight to ensure proper operation. These 110-120 VAC solenoid kits include an AVS-5111-120A, 4-way, direct-acting solenoid valve, and everything else needed to operate an UltraLock or HVA pneumatic gate valve including air line tubing push-to-connect fittings. For faster actuation of larger gate valves, larger tubing and different push-to-connect fittings may be used. Kit Components: AVS-5111-120A 4-way solenoid valve. Mounting bracket for use with Ideal Vacuum UltraLock or HVA pneumatic gate valves. All necessary mounting screws and hardware for use with UltraLock pneumatic gate valves. Five (5) 4 mm OD tubing push-to-connect to 1/8" male universal pipe thread adapters. Two (2) exhaust mufflers. 6’ length of 1/4" OD flexible polyurethane tubing. Solenoid Valve Features: 24 VDC, 3.5 VA. 20-115 PSIG working input pressure. 215 PSIG max input pressure. 80 PSIG required for most pneumatic gate valves. Five (5) 1/8" NPSF ports: A: Normally open outlet to P. Exhausted to A when energized. B: Normally exhausted outlet to R. Open to P when energized. P: Inlet. R: Normally closed. Exhaust from A when energized. S: Normally exhaust from B. Closed when energized. Locking manual override button. Din style wiring connector with LED indicator. Buna rubber seals. When properly connected, if there is an interruption to the solenoid’s electrical power, the attached gate valve immediately closes and remains in the closed position until power is restored. The solenoid valve has a red manual override button. When properly connected, pushing the overide button forces the gate valve to open. When the override button is released the gate valve closes. The override button may be locked in the pressed position using a flat head screw driver and rotating the button 90°. Rotating the button back to its original position will allow it to spring back to the unpressed position. Installation Instructions: Mount the solenoid on to the gate valve bonnet using the included mounting bracket and screws. When no tapped holes are present, the solenoid must be mounted remotely. Attach air line tubing between solenoid port B and the gate valve’s port which opens the gate valve when pressurized (the port closest to the bonnet). Attach air line tubing between solenoid port A and the other gate valve port which closes the gate valve when pressurized (the port at the top of the pneumatic cylinder). Optionally connect solenoid ports R and S to house exhaust. Attach solenoid port P to (user supplied) house air at 80 psi. Apply 80 PSI air pressure to the solenoid valve and verify that the gate valve closes and remains closed. If the gate valve opens and remains open, switch the tubes to solenoid outlets A and B. Press the manual overide switch and verify that the gate valve opens and remains open while the switch is pressed. Release the manual overide switch and verify that the gate valve closes again. With no electrical power applied, the solenoid will automatically be in the closed, locked position . When electrical power is applied to the solenoid, the gate valve will open.

Solenoid Kit for UtraLock Pneumatic Gate Valve, 24 VDC, Includes Mounting Hardware. This solenoid kit is for use with an Ideal Vacuum ULTRALockTM or HVA pneumatically operated gate valve. The solenoid operates the gate valve’s pneumatic piston. All fittings and connections must be leak-tight to ensure proper operation. These 24 VDC solenoid kits include an AVS-5111-24D, 4-way, direct-acting solenoid valve, and everything else needed to operate an UltraLock or HVA pneumatic gate valve including air line tubing push-to-connect fittings. For faster actuation of larger gate valves, larger tubing and different push-to-connect fittings may be used. Kit Components: AVS-5111-24D 4-way solenoid valve. Mounting bracket for use with Ideal Vacuum UltraLock or HVA pneumatic gate valves. All necessary mounting screws and hardware for use with UltraLock pneumatic gate valves. Five (5) 4 mm OD tubing push-to-connect to 1/8" male universal pipe thread adapters. Two (2) exhaust mufflers. 6’ length of 1/4" OD flexible polyurethane tubing. Solenoid Valve Features: 24 VDC, 2.5 W. 20-115 PSIG working input pressure. 215 PSIG max input pressure. 80 PSIG required for most pneumatic gate valves. Five (5) 1/8" NPSF ports: A: Normally open outlet to P. Exhausted to A when energized. B: Normally exhausted outlet to R. Open to P when energized. P: Inlet. R: Normally closed. Exhaust from A when energized. S: Normally exhaust from B. Closed when energized. Locking manual override button. Din style wiring connector with LED indicator. Buna rubber seals. When properly connected, if there is an interruption to the solenoid’s electrical power, the attached gate valve immediately closes and remains in the closed position until power is restored. The solenoid valve has a red manual override button. When properly connected, pushing the overide button forces the gate valve to open. When the override button is released the gate valve closes. The override button may be locked in the pressed position using a flat head screw driver and rotating the button 90°. Rotating the button back to its original position will allow it to spring back to the unpressed position. Installation Instructions: Mount the solenoid on to the gate valve bonnet using the included mounting bracket and screws. When no tapped holes are present, the solenoid must be mounted remotely. Attach air line tubing between solenoid port B and the gate valve’s port which opens the gate valve when pressurized (the port closest to the bonnet). Attach air line tubing between solenoid port A and the other gate valve port which closes the gate valve when pressurized (the port at the top of the pneumatic cylinder). Optionally connect solenoid ports R and S to house exhaust. Attach solenoid port P to (user supplied) house air at 80 psi. Apply 80 PSI air pressure to the solenoid valve and verify that the gate valve closes and remains closed. If the gate valve opens and remains open, switch the tubes to solenoid outlets A and B. Press the manual overide switch and verify that the gate valve opens and remains open while the switch is pressed. Release the manual overide switch and verify that the gate valve closes again. With no electrical power applied, the solenoid will automatically be in the closed, locked position . When electrical power is applied to the solenoid, the gate valve will open.

Bolt Kit for ISO-F DN 63 Gate Valve with Threaded Hole Flange, Includes 4 Silver Plated M8 x 1.25 x 20 mm Long Bolts and 4 Stainless Steel Washers. These bolt kits consist of 4 hex head, silver plated M8 x 1.25 bolts, 20 mm long, and 4 stainless steel flat washers. They are properly sized for connecting ISO-F 63 hole through flanges and fittings to the threaded holes in ISO 63 gate valves. Gate valves have standardized flange, thread, and thread depth specifications. These bolt kits are correct for connecting any gate valve of this flange type and size to an unthreaded flange of the same size, no matter the manufacturer. A centering ring with O-ring seal is required and sold separately (part number P101761). The length of the bolts in this kit are specially measured so they tighten ISO-F to ISO-F flanges fully but don’t bottom out in the blind threaded holes of the gate valve’s flange. The bolts are silver plated to prevent galling or seizing of the bolts and to make them easier to loosen, especially if they have been heated to bakeout temperatures. If the gate valve is to be connected/adapted to an ISO-K type flange, such as might be found on a turbo pump, single claw clamps with longer bolts and centering rings are required.

Rotatable Bolt Ring Adapter for non bolted NW-63 Vacuum Fittings, ISO-LF Large Flange Size NW-63, 4 bolt holes, AluminumThese rotatable bolt ring adapters are for making non bolted ISO-K collar flanges into ISO-F smooth bolt hole flanges. Standard ISO LF NW Centering Rings can be used. (see far right graphic above). The NW-63 ISO-KF 63 flange has 4 bolt holes. They follow International Standards Organization (ISO) standards and have a flange size of NW-63. ISO flanged vacuum fittings are commonly used to build process vacuum plumbing and systems for industrial applications. The fittings are quick to assemble using double claw clamps or bolts and a centering ring. The Viton® centering ring contains a rubber/elastomeric o-ring. The ISO standard sizes for large flanges are NW-63, NW-80, NW-100, NW-160, NW-200, NW-250, NW-320, NW-400, NW-500, NW-630. These vacuum flanges are made of non-corrosive aluminum.Rotatable Bolt Ring, NW-63 Vacuum Fittings, ISO-LF Large Flange Size NW-63, AluminumISO-LF Flange Size: NW-63 with four bolt holes.Material: Aluminum with steel retaining ring.

ISO-K Single Claw Clamp for ISO-K 63, 80, and 100, fits ISO-63K thru ISO-100K Vacuum Flanges, 35mm long M8-1.25 Bolt, Aluminum. These single claw clamps, made of Aluminum, are used to join a size NW 63 thru 100 ISO-K vacuum flange to an M8-1.25 mm tapped flange. These single clamps fit ISO-K DN 63 thru 100 vacuum flanges and follow vacuum technology standards described in DIN 28404 and ISO 1609. The ISO-K style fittings are quick to assemble using claw clamps (please see figure - click to enlarge) and can be connected in any orientation. The claw clamp hooks into a ridged groove in the back side of the ISO-K vacuum flange. The union requires a centering ring which contains rubber, elastomeric, O-ring to form the vacuum seal between the two flange faces. The clamps are commonly used to build process vacuum plumbing and systems for industrial vacuum applications. The ISO standard sizes for large LF flanges are ISO-LF DN 63, 80, 100, 160, 200, 250, 320, 400, 500, 630, 800, and 1000. These single claw clamps are made of aluminum and work with flange sizes ISO-LF 63, 80, and 100. The quantity of clamps required per flange size is given below.Quantity Required per FlangeISO-63: 4ISO-80: 8ISO-100: 8Specifications:M8-1.25 BoltBolt Length: 35mmTorque to 7-10 lb-ftUse Wrench: 13mmISO-K Single Claw Clamp for ISO-K 63, 80, and 100, fits ISO-63K thru ISO-100K Vacuum Flanges, 35mm long M8-1.25 Bolt, Aluminum. Common Dimensions:A = 1.18" (30mm)B = 0.39" (10mm)C = 0.63" (16mm)