MKS GM50A Mass Flow Controller (MFC) Analog-Controlled, Range of 0.4 to 20 sccm, 15-pin D-subminiature, 4 VCR Male.
MKS Part Number: GM50A013201RMM020.
This MKS GM50A Mass Flow Controller is calibrated for N2 or equivalent, with a control range of 0.4 to 20 sccm. It has a 15-pin D-subminiature analog connector with tied grounds and 0-5 VDC flow input and output signals. The gas inlet and outlet fittings are Swagelok® 4 VCR® male. The valve seal is normally closed and made of Teflon™. Typical response times are on the order of 500 milliseconds.
Swagelok, VCR-TM Swagelok Company
Teflon-TM The Chemours Company FC, LLC.
