MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 1 to 50 sccm, Calibrated for Oxygen, RS-485 Serial Communication Protocol with a 9-Pin Connector, 4 VCR Male.
MKS Part Number: GM50A015501R5M020.
This MKS GM50A Mass Flow Controller is calibrated for oxygen or equivalent, with a control range of 1 to 50 sccm. It can be reconfigured for other gases via digital control, but the flow control range may change based on the gas chosen. It has a 9-pin digital connector which communicates via RS-485 serial protocol. The gas inlet and outlet fittings are Swagelok® 4 VCR® male. The valve seal is normally closed and made of Teflon™. Typical response times are on the order of 500 milliseconds.
Swagelok, VCR-TM Swagelok Company
Teflon-TM The Chemours Company FC, LLC.