MKS 937B Mass Flow Control Card For Series 946 Controllers and Dual Mass Flow Controllers.
MKS Part Number: 20000712.
The MKS 937B Mass Flow Control Card is compatible with the 946 and dual Mass Flow controllers.
These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.
