BOC Edwards iQDP80 (iQDP-80) Dry Semiconductor DryStar Vacuum Pump Rebuilt The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools. Every dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. Each pump is fully dismantled and all parts are decontaminated and inspected. Damaged or worn parts are replaced. All bearings, o-rings, seals, and gaskets are replaced. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pumps are leak tested to ensure safety during operation. Final pump is cleaned and painted as required.

BOC Edwards iQDP80 (iQDP-80) Dry Semiconductor DryStar Vacuum Pump with iQMB-250 (iQMB250) Booster Rebuilt The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools. Every dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. Each pump is fully dismantled and all parts are decontaminated and inspected. Damaged or worn parts are replaced. All bearings, o-rings, seals, and gaskets are replaced. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pumps are leak tested to ensure safety during operation. Final pump is cleaned and painted as required.

BOC Edwards iQDP80 (iQDP-80) Dry Semiconductor DryStar® Vacuum Pump with iQMB-1200 (iQMB1200) Booster Rebuilt The iQDP80 with iQMB-1200 Booster is the perfect combination for subfab semiconductor and solar cell panel manufacture. This iQ series combo has proven performance and high reliability in the most demanding applications. Patented rotor arrangement gives high volumetric efficiency with low power input. Short, simple gas path maximizes internal conductance and minimizes dead space. No inter-coolers needed. Low operation costs and the consumables are virtually eliminated. Safer gas handling. Clean vacuum with no backstreaming. Designed for low maintenance and intrinsically non polluting. These features make the Drystar® pumps ideal for: subfab semiconductor processing, solar cell panel manufacturing, clean applications in freeze drying, vacuum deposition and special R&D, load lock chambers, vacuum furnaces and many chemical processes. All major control elements are located within the footprint of the pumping system. The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted pump display module (joy stick), OEM specified tool interface module, or a local or fab-wide network PC or laptop computer. The hand held LCD pump display module (joy stick) provides access to: system control and configuration, system status and monitored values, diagnostics, and recommended corrective action. The OEM specified tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools. And your PC used locally or via a network for remote monitoring and system diagnostics. The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed. All bundled up and totally rebuilt for an intelligent choice for your most demanding vacuum needs. Every dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. Each pump is fully dismantled and all parts are decontaminated, cleaned and inspected. All components measured and inspected to original factory specifications. Claws and rings are re-coated. Temperature control valve is cleaned and replaced. Pump motor bearings are replaced. Exhaust valve and silencer are cleaned and rebuilt. Water flow lines are cleaned and tested. Thermal snap switch are tested. Gearbox is filled with fresh PFPE charge. Safety features are tested, eg., EMO, exhaust over pressure, pump over temp, etc. Pump is leak tested and all test results are provided. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pump is then clean, painted and boxed up by our shipping department for worldwide shipment. For a price quote or any information for your specific applications give us a call at: (505) 872-0037.