Keyword Ideal Vacuum Part Number Manufacturer Part Number
(Sold As IS OBO) The Explorer platform is a versatile high-vacuum R&D platform for magnetron sputtering. This PVD Physical Deposition System is a Denton Explorer-14, a tool for depositing conductive metallic films. Sputter deposition is achieved by bombarding a source material with energetic ions, typically Ar+. Atoms at the surface of the target are knocked loose, and transported to the surface of the substrate, where deposition occurs. Electrically conductive material such as Al, W, and Ti can use a dc power source, in which the target acts as the cathode in a diode system. Sputtering of dielectrics such as silicon dioxide, or aluminum oxide requires an Rf power source to supply energy to the argon atoms. Sputter films are ideal for sidewall coverage in low thermal budget cases for contact and insulating layers over features. The Denton Explorer-14 has a 14" D-shaped chamber with LN2 supported pumping to reach high vacuum in the process chamber. The tools two magnetron sputtering sources are set up to allow for DC, Pulsed-DC and RF sputtering of various materials.
Product Number: P1010342