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New MKS 640B Mass Flow Electronic Absolute Pressure Controller 4 torr, 20 sccm, Swagelok 4 VCR

Print Version
Condition:
  New
Part Number:
  P108362
Warranty:
  Full Manufacturer's Warranty

Out of Stock  

Sale: $3,350.00

New MKS 640B Mass Flow Electronic Absolute Pressure Controller 4 torr, 20 sccm, Swagelok 4 VCR 3350
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Description

New MKS 640B Mass Flow Electronic Absolute Pressure Controller 4 torr, 20 sccm, Swagelok 4 VCR

The PFC-20 MFC is a Mass Flow Controller which is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR®.

The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Its wide range thermal sensor and normally-closed proportioning control valve allows for real-time feedback control for applications with inlet pressures from 4 to 1200 Torr. These features make the PFC-20 MFC perfect for a large variety of Ion Implantation applications, especially the development and processing of semiconductors. Because of its multi-gas, multi-range capabilities, the PFC-20 MFC can dramatically lower operating costs and eliminate the need for a large on hand MFC inventory, reduce bottle change-outs and increase efficiency, speed and accuracy.

Swagelok, VCR-TM Swagelok Company

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CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



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