New MKS 640B Mass Flow Electronic Absolute Pressure Controller 4 torr, 20 sccm, Swagelok 4 VCR
The PFC-20 MFC is a Mass Flow Controller which is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR®.
Swagelok, VCR-TM Swagelok Company
The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Its wide range thermal sensor and normally-closed proportioning control valve allows for real-time feedback control for applications with inlet pressures from 4 to 1200 Torr. These features make the PFC-20 MFC perfect for a large variety of Ion Implantation applications, especially the development and processing of semiconductors. Because of its multi-gas, multi-range capabilities, the PFC-20 MFC can dramatically lower operating costs and eliminate the need for a large on hand MFC inventory, reduce bottle change-outs and increase efficiency, speed and accuracy.