Edwards Novellus C3 Micro TIM Module
Novellus C3 Micro TIM provides a tool interface to Novellus C3 platforms for dry pumps with a MicroTIM slot. A Novellus C3 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Novellus C3 Micro TIM is compatible with the following Edwards pumps.
- EPX Series
- iGX Series
- GX Series
- iXH Series
- iXL Series
- Also for use on multi pump
systems with a System Controller.
Where these modules already exist they may be utilized to provide control and monitoring of
the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.