Skip to main content
× Home Services Products Catalogs Downloads Tech Support About Contact Careers (505) 872-0037

(505) 872-0037

Shopping Cart Icon
cart
 
Login Icon
login
Edwards nEXT300D TStations On Sale Edwards nXDS Dry Scroll Pump On Sale Edwards nXR Multi Stage Roots Pumps On Sale Leybold VaroDry Series Pumps Agilent DS Series Rotary Vane Pumps On Sale Edwards Stocks Microvac Piston Pumps

Keyword       Ideal Vacuum Part Number       Manufacturer Part Number

× Vacuum Pumps Modular Vacuum Chambers Welded Vacuum Chambers Vacuum Chamber Systems Fittings and Flanges Feedthroughs Vacuum Valves Rebuild Kits, Parts, And Motors Vacuum Fluids, Oils, and Greases Turbo Pumps And Controllers Filters Traps and Silencers Vacuum Ovens Gas and Leak Detection Gauges And Controllers Pressure Measurement Chillers
Product Image 1
Product Image 2
Product Image 3

Condition:
  New
Part Number:
  P1011723
Warranty:
  Full Manufacturer's Warranty

Available Now:  1   Edwards Novellus C3 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360360 1482.35


Sale: $1,482.35


×

Load

Print Version

Edwards Novellus C3 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360360


Edwards Novellus C3 Micro TIM Module
D37360360

Novellus C3 Micro TIM provides a tool interface to Novellus C3 platforms for dry pumps with a MicroTIM slot. A Novellus C3 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Novellus C3 Micro TIM is compatible with the following Edwards pumps.

  • EPX Series
  • iGX Series
  • GX Series
  • iXH Series
  • iXL Series
  • Also for use on multi pump systems with a System Controller.
Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.


Press ESC to Close


Ideal Vacuum Parts list A
PDF Logo Edwards Micro Tool Interface TIM Instruction Manual.pdf

PDF Logo Edwards iTIM Instruction Manual.pdf



You may wish to consider the following products:

Ideal Vacuum Logo Water Mark
CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



Press ESC to Close


deepbox image 2