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Edwards Novellus C3 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360360

Print Version
Condition:
  New
Part Number:
  P1011723
Warranty:
  Full Manufacturer's Warranty

Available Now:  1  

Sale: $1,680.98

Edwards Novellus C3 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360360 1680.98
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Description

Edwards Novellus C3 Micro TIM Module
D37360360

Novellus C3 Micro TIM provides a tool interface to Novellus C3 platforms for dry pumps with a MicroTIM slot. A Novellus C3 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Novellus C3 Micro TIM is compatible with the following Edwards pumps.

  • EPX Series
  • iGX Series
  • GX Series
  • iXH Series
  • iXL Series
  • Also for use on multi pump systems with a System Controller.
Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Brochure

Ideal Vacuum Parts list A
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CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



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