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Condition:
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Part Number:
  P107586
Warranty:
  Varian Warranty

Out of Stock   Agilent Varian jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301 293.8425


Sale: $293.84


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Agilent Varian jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301


Agilent Varian jet assembly with top hat and shield for AX-65 Diffusion Pump
Agilent Varian Part Number L9674301

This is the jet assembly with top hat and shield for the AX-65 Diffusion Pump. For location see item #1 on (diagram exploded view & parts illustration) below.



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Specifications
Specification Units AX-65 with cold cap AX-65 with baffle
Operating Range
Torr
mbar
3x10⁻³ to < 5x10⁻⁸
3.9x10⁻³ to < 6.5x10⁻⁸
8.0x10⁻³ to < 5x10⁻⁸
10.4x10⁻³ to < 6.5x10⁻³
Pumping Speed,
Maximum
l/s, Air
l/s, Helium
65
90
30
65
Throughput (Air), Max.
Optimum Range

Overload Range
(@ 1x10⁻² Torr)
Torr-l/s
mbar-l/s

Torr-l/s
mbar-l/s
0.19
0.25

0.30
0.40
Forepressure, Max.
No Load


Full Load
Torr
mbar

Torr
mbar
0.75
1.00

0.60
0.78
Compression Ratio Air
He
4x10⁻⁷
4x10⁻⁶
Backstreaming Rate
at Pump Inlet
mg/cm² < 2x10⁻⁴ < 2x10⁻⁵
Electrical Power
VAC, 50/60 Hz
1 Phase
Watts 200/250
Warmup Time minutes 7
Cooldown Time minutes 10
Fluid Charge cc 30
Recommended
backing pump
capacity
cfm (m³/hr) ≥ 1.5 (2.5)
Cooling Fan cfm 30
Inlet Flange N/A NW50 or ISO-63-K
Body N/A Stainless steel
Jet Assembly N/A Three-stage, self-aligning, aluminum, w/ aluminum cold cap
Net Weight lbs (kg) 8 (3.63)

AX-65 Diffusion Pump Replacement Parts List

Description Part No. Item
Jet Assembly L9674301 1
Cold Cap L9675301 2
Inlet Baffle L9706001 3
Inlet Baffle Retrofit Kit R1160065 3
Jet Alignment Kit L9995301 4
Heaters (one heater required per pump) 5
   90 V / 250 watt Heater Harness L9994301 5.1
   115 V / 250 watt Heater Harness L9994303 5.2
   165 V / 250 watt Heater Harness L9994302 5.3
   220 V / 250 watt Heater Harness L9994304 5.4
   115 V / 250 watt Heater Harness L9994307 5.5
   220 V / 250 watt Heater Harness L9994308 5.6
Normally Closed Thermal Switch (set to open at 365°) L9964001 6
Optional Normally Open Switch (set to close at 170°) L9964002 7
Fan 661300138 8
Foreline Baffle L9676301 9
Inlet Centering Ring Assembly, NW50 with Viton O-ring L9680301 10
Foreline Centering Ring Assembly, NW16 with Viton O-ring KC16AV 11
Bottom Insulation L9701002 12
Santovac 5 diffusion pump fluid, 40 cc 695405001 13
PDF Logo Agilent Varian AX-65 Diffusion Pump Manual.PDF

PDF Logo Agilent Diffusion Pumps Catalog.pdf



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CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



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