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  Varian Warranty

Available Now: 1   Agilent Varian VHS-6 Water Cooled Diffusion Pump ASA 6, 11 in OD, Ext Cold Cap, 120V 2200W, 85826311 8100


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Agilent Varian VHS-6 Water Cooled Diffusion Pump ASA 6, 11 in OD, Ext Cold Cap, 120V 2200W, 85826311

Agilent Varian VHS-6 Water Cooled Diffusion Pump ASA 6, 11 in OD, Extended Cold Cap, 120V 2200W Agilent Varian Part Number 85826311

The Agilent Varian VHS-6 has been designed to fill a special need in applications where high pumping speeds are required and space limitations demand a compact pump. The VHS-6 pump is a rugged, general-purpose unit with an operating range of 2 x 10-3 to <5 x 10-9 Torr. The Agilent Varian VHS-6 is ideal for applications requiring fast cycling because of its high pumping speed (maximum rated at 2400 l/s) air combined with high forepressure tolerance (0.65 Torr with no-load and 0.55 Torr when at full gas load). Backstreaming rate of the unit is 1x10-4 mg/cm2/ min, without the use of any cooled cold cap.

This Agilent Varian VHS-6 Diffusion Pump Includes:
  • 6 Inch ASA Inlet Flange (11 Inch OD Flange, 8 Smooth Bolt Holes, 0.81" Diameter Holes)
  • 1 1/2 inch ASA Outlet Foreline Flange
  • Extended Cold Cap
  • 2400 l/s Maximum Pumping Speed Air
  • 120 VAC @ 2200 Watt Heater
  • Designed To Be Used With Santovac 5 Diffusion Pump Oil
Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the outlet. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. The Agilent Varian VHS-6 can pump down to pressures of <5x10-9 Torr. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump, roughing pump is typically used to maintain an outlet pressure around 1 mTorr.

These Agilent Varian Diffusion Pumps are very reliable, simple in design and operate with no noise or vibration. Diffusion pumps are still the most economical means for creating high-vacuum pressures. Diffusion pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps. They can be ordered with a 1-phase 115, 208, 240 VAC heater harness and with standard or extended cold cap. We stock and sell Santovac 5 diffusion pump fluids for this pump. Please see below in our “Related” section for additional accessories that may benefit your vacuum applications and maintenance needs. We offer a large variety of vacuum greases, oils, vacuum fittings, hoses, vacuum gauges, sensors/transducers, parts and accessories sold separately on this website.

These Agilent Varian VHS-6 diffusion pumps have ASA 6 inch inlet flange, operate on 1-phase 120 VAC, Extended cold cap and has Agilent Varian part number 85826311. The Agilent Varian VHS-6 diffusion pump user's instruction manuals can be downloaded in PDF format below. These are typical stock items that often ship same day as order is placed.

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Specification Value
Pumping Speed, Operating Range 1500 l/s air, 1,930 l/s He/H₂
Maximum Pumping Speed 2,400 l/s air w/standard cold cap; 950 w/extended cold cap
Maximum Throughput 2.4 T-l/s (3.2 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar-l/s) @ 0.01 Torr
Operating Range 1.5x10⁻³ to < 5x10⁻⁹ Torr (2.10 x 10⁻³ < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure No Load: 0.65 Torr (0.85 mbar)
Full Load: 0.55 Torr (0.72 mbar)
Recommended Backing Pump ≥ 17 cfm (29 m³/hr)
Backstreaming Rate < 5x10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time 10 minutes
Cooldown Time 10 minutes (with quick cool coil)
Fluid Charge 500 cc - exact fluid charge available
Electrical Requirements 1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power 2,200 Watts
Cooling Water Requirements 0.25 gpm (50 l/h) at 60-80 °F (15-26 °C)
Water Connections ⅛ in. FPT Tee

VHS-6 Diffusion Pump Replacement Parts List

Description Part No. Item
Standard Cold Cap Assembly 86488301 1
Extended Cold Cap Assembly F6455001 2
Sight Glass Repair Kit consisting of: L8908301 3
   Sight Glass L8816001 5.1
   Gasket, Teflon L9694001 5.1
   O-ring, Viton, Parker No. 2-113 CommI 5.1
   O-ring, Viton, Parker No. 2-226 CommI 5.1
Jet Assembly F3365301 4
Splash Baffle F4780301 5
Foreline Baffle Assembly L9172301 6
Thermal Switch Includes: L8912301 7
   Switch (set at 300 °F – 147 °C) 642906025 7a
   Lug 648056680 7b
   Wire 656179100 5.1
   Box Insulator 89867001 7d
Heaters (one heater required per pump) 8
   120 V / 2200 watt Heater Element 647306125 5.1
   208 V / 2200 watt Heater Element 647306175 5.1
   240 V / 2200 watt Heater Assembly 647306225 5.1
VHS-4 heater wire, 10 AWG, 24 inches (3 per pump required) X3901-68001 9
Lugs, Replacement, nickel 648056680 10
Heater Clamping Plate 86086301 11
Heater Insulation 86087001 12
Baffle Retaining Ring 699992156 13
O-Ring Kit includes: K0377184 14
   3 Butyl inlet flange O-ring, Parker No. 2-258 5.1
   10 Viton fill and drain O-rings (old style), Parker No. 2-112 5.1
   10 Viton fill and drain O-rings (new style, Parker No. 2-113 5.1
   1 Sight glass O-ring, Parker No. 2-226 5.1
   1 PTFE gasket 5.1
Screw, Rd hd machine, no. 8-32x31/416, stainless steel Screw 15
Stud, no. 8-32 x 1/2, stainless steel Stud 16
Screw, Socket hd cap, no. 8-32x11/44, stainless steel Screw 17
Centering ring for ISO inlet flange, 160K IC160SV 18
Centering ring for ISO foreline flange, KF40 KC40SV 19
Santovac 5 diffusion pump fluid, 500 cc 695405005
Installation and Operation Manual 699901021
PDF Logo Agilent Varian VHS4 VHS6 & VHS250 Diffusion Vacuum Pumps.pdf

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5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001

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