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Agilent Varian VHS-6，ASA 6 英寸入口扩散泵 O 形圈套件，PN K0377184

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Agilent Varian VHS-6，ASA 6 英寸入口扩散泵 O 形圈套件，PN K0377184

印刷版

健康）状况：

新的

零件号：

P106823

保修单：

完整的制造商保修

现在有空 3

销售： NT$9,345.09

货币： New Taiwan Dollar (TWD)

描述

Agilent Varian VHS-6，ASA 6 英寸入口扩散泵 O 形圈套件。
瓦里安代理 PN K0377184

这是 Agilent Varian VHS-6 ASA（ASA 6 英寸）扩散泵 O 形圈套件。

O 形圈套件包含：

0.84 MB, PDF

PDF

Specifications
Specification	Value
Pumping Speed, Operating Range	1500 l/s air, 1,930 l/s He/H₂
Maximum Pumping Speed	2,400 l/s air w/standard cold cap; 950 w/extended cold cap
Maximum Throughput	2.4 T-l/s (3.2 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar-l/s) @ 0.01 Torr
Operating Range	1.5x10⁻³ to < 5x10⁻⁹ Torr (2.10 x 10⁻³ < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure	No Load: 0.65 Torr (0.85 mbar) Full Load: 0.55 Torr (0.72 mbar)
Recommended Backing Pump	≥ 17 cfm (29 m³/hr)
Backstreaming Rate	< 5x10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time	10 minutes
Cooldown Time	10 minutes (with quick cool coil)
Fluid Charge	500 cc - exact fluid charge available
Electrical Requirements	1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power	2,200 Watts
Cooling Water Requirements	0.25 gpm (50 l/h) at 60-80 °F (15-26 °C)
Water Connections	⅛ in. FPT Tee

VHS-6 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Standard Cold Cap Assembly	86488301	1
Extended Cold Cap Assembly	F6455001	2
Sight Glass Repair Kit consisting of:	L8908301	3
Sight Glass	L8816001	5.1
Gasket, Teflon	L9694001	5.1
O-ring, Viton, Parker No. 2-113	CommI	5.1
O-ring, Viton, Parker No. 2-226	CommI	5.1
Jet Assembly	F3365301	4
Splash Baffle	F4780301	5
Foreline Baffle Assembly	L9172301	6
Thermal Switch Includes:	L8912301	7
Switch (set at 300 °F – 147 °C)	642906025	7a
Lug	648056680	7b
Wire	656179100	5.1
Box Insulator	89867001	7d
Heaters (one heater required per pump)		8
120 V / 2200 watt Heater Element	647306125	5.1
208 V / 2200 watt Heater Element	647306175	5.1
240 V / 2200 watt Heater Assembly	647306225	5.1
VHS-4 heater wire, 10 AWG, 24 inches (3 per pump required)	X3901-68001	9
Lugs, Replacement, nickel	648056680	10
Heater Clamping Plate	86086301	11
Heater Insulation	86087001	12
Baffle Retaining Ring	699992156	13
O-Ring Kit includes:	K0377184	14
3 Butyl inlet flange O-ring, Parker No. 2-258		5.1
10 Viton fill and drain O-rings (old style), Parker No. 2-112		5.1
10 Viton fill and drain O-rings (new style, Parker No. 2-113		5.1
1 Sight glass O-ring, Parker No. 2-226		5.1
1 PTFE gasket		5.1
Screw, Rd hd machine, no. 8-32x31/416, stainless steel	Screw	15
Stud, no. 8-32 x 1/2, stainless steel	Stud	16
Screw, Socket hd cap, no. 8-32x11/44, stainless steel	Screw	17
Centering ring for ISO inlet flange, 160K	IC160SV	18
Centering ring for ISO foreline flange, KF40	KC40SV	19
Santovac 5 diffusion pump fluid, 500 cc	695405005
Installation and Operation Manual	699901021