The MKS HPS® 947 Convection Enhanced Pirani Gauge Controller offers many standard features at a low price, and is very easy to use. All operating controls are conveniently accessible from the front panel of the controller. The 947 is useful as either a small system controller or as a module in more sophisticated pressure vacuum control environments. The 947 can be used in many different vacuum monitoring and control applicaitons, such as semiconductor, analytical, and industrial coating (solar) and freeze drying. An analog output signal proportional to pressure is standard and is accessible from the rear of the controller. The 947 Processes are controlled with two independent relay set
points that are standard on this single-channel controller.
The relays can be set to trip anywhere within the controller’s set point range.