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Keyword       Ideal Vacuum Part Number       Manufacturer Part Number

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NEW Edwards MK5 iH1000 iH 1000 Subfab Harsh Chemical Series Semiconductor Dry Vacuum Pump A59030908


The MK5 Edwards iH1000 iH 1000 Series subfab dry vacuum pumps offers high reliability for difficult harsh processes, such as Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapor Deposition (LPCVD), where particulate, condensable and corrosive by-products are present. The Edwards iH1000 iH 1000 subfab dry vacuum pumps operate at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. The Edwards iH1000 iH 1000 system includes an iH80 dry pump and incorporate a direct-drive booster.

Condition: New



Product Number: P107315



Price: $46,625.00



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NEW Edwards MK5 iH1800 iH 1800 Subfab Harsh Chemical Series Semiconductor Dry Vacuum Pump A59040908


The MK5 Edwards iH1800 iH 1800 Series subfab dry vacuum pumps offers high reliability for difficult harsh processes, such as Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapor Deposition (LPCVD), where particulate, condensable and corrosive by-products are present. The Edwards iH1800 iH 1800 subfab dry vacuum pumps operate at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. The Edwards iH1800 iH 1800 system includes an iH160 dry pump and incorporates a large capacity direct-drive booster for high-throughput applications.

Condition: New



Product Number: P107316



Price: $59,487.00



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NEW Edwards MK5 iH600 iH 600 Subfab Harsh Chemical Series Semiconductor Dry Vacuum Pump A59020908


The MK5 Edwards iH600 iH 600 Series subfab dry vacuum pumps offers high reliability for difficult harsh processes, such as Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapor Deposition (LPCVD), where particulate, condensable and corrosive by-products are present. The Edwards iH600 iH 600 subfab dry vacuum pumps operate at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. The Edwards iH600 iH 600 system includes an iH80 dry pump and incorporate a direct-drive booster.

Condition: New



Product Number: P107314



Price: $43,410.00



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NEW BOC Edwards iH80 iH 80 Subfab Harsh Chemical Series Semiconductor Dry Vacuum Pump A533-50-908


The BOC Edwards iH80 iH 80 Series subfab dry vacuum pumps offers high reliability for difficult harsh processes, such as Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapor Deposition (LPCVD), where particulate, condensable and corrosive by-products are present. The BOC Edwards iH80 iH 80 subfab dry vacuum pumps operate at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. The BOC Edwards iH80 iH 80 system has an HCDP80 chemical dry pump (HCDP) that has enclosed water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

Condition: New



Product Number: P107311



Price: $27,500.00



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NEW Edwards MK5 iH80 iH 80 Subfab Harsh Chemical Series Semiconductor Dry Vacuum Pump A59000957


The MK5 Edwards iH80 iH 80 Series subfab dry vacuum pumps offers high reliability for difficult harsh processes, such as Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapor Deposition (LPCVD), where particulate, condensable and corrosive by-products are present. The Edwards iH80 iH 80 subfab dry vacuum pumps operate at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. The Edwards iH80 iH 80 system has an HCDP80 chemical dry pump (HCDP) that has enclosed water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

Condition: New



Product Number: P107313



Price: $32,691.00



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CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com