MKS 627H 0.05 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.15% of Reading, Vertical Calibration.
MKS Part Number PN: 627HU5TBD1B.

The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices.

These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 0.05 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.15% of reading, with vertical calibration, and have MKS part number 627HU5TBD1B.

Compatible Controller and Cables:

Product Features:

Excellent long-term stability
Percent of Reading accuracy for more precise output signal in lower pressure ranges
Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes
All-Inconel corrosion-resistant wetted surfaces
Faster warm-up time
Visual and electrical status of temperature and heater control circuit
Compatible with earlier Baratron capacitance manometers, MKS power supply/readout modules, and pressure controllers
Measures total pressure directly, independent of gas composition
High overpressure rating for improved reliability
Cleanroom-compatible stainless steel package