The Oerlikon Leybold UL 200 Dry helium leak detectors have a built-in dry internal diaphragm backing vacuum pump. The diaphragms inside the dry diaphragm pump need to be replaced after several years of solid operation. This is important maintenance, as good backing pressure is a requirement of the turbomolecular pump inside the Oerlikon Leybold UL-200 helium leak detector. This spares rebuild kit has the replacement parts needed to rebuild the dry internal diaphragm backing pump and has Oerlikon Leybold part number 20099156.
This is the new replacement ion source for the mass spectrometer tube on Oerlikon Leybold UL-100, UL-200, and UL-500 helium leak detectors. This replacement part has Oerlikon Leybold Part Number 16504.