These Disposable Liners are designed to fit the Model 250 Water-Cooled Exhaust Trap.
The exhaust trap cools the exhaust gases from the pump and causes particulates to collect on the
liners in the trap. This minimises the collection of particulates in the exhaust-system, where they
may lead to blockage and so result in downtime of your pumping system. When fully coated, the
liners can be easily removed from the trap and be replaced with new liners.
The Water-Cooled Exhaust Trap and the Disposable Liners are particularly suitable for use with
a pump which is used for an LPCVD nitride process, such as Edwards QDP Dry Pumps. For complete specifications, download instruction manual (see below AVAILABLE DOWNLOADS).
The Edwards Model 250 Water Cooled Exhaust Trap cools the exhaust gases from the pump and causes
particulates to collect in the Exhaust Trap. This prevents the collection of particulates in the
exhaust-system. The Exhaust Trap is designed for connection to a pump which is used in an
LPCVD nitride process using dichlorosilane or hexachlorodisilane and ammonia.
The Exhaust Trap is not suitable for connection to a pump which is used in other processes.
The Exhaust Trap is designed to fit BOC Edwards CDP and QDP dry pumps and Drystar MKI,
MKII and QMKII dry pumping systems. Your system must incorporate a pressure switch to
shut-down the pump if the exhaust system becomes blocked.
The Exhaust Trap has a main outer body which is mounted on a baseframe. You can
adjust the height of the trap-body in the baseframe to fit the Exhaust Trap to different pumps.
The baseframe has castors for ease of movement of the Exhaust Trap and levelling feet so
that you can securely locate the Exhaust Trap in its operating position.
For complete specifications, download instruction manual (see below AVAILABLE DOWNLOADS).