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gn="justify">The MK5 Edwards iH1000 iH 1000 Series subfab dry vacuum pumps offers high reliability for difficult harsh processes, such as Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapor Deposition (LPCVD), where particulate, condensable and corrosive by-products are present. The Edwards iH1000 iH 1000 subfab dry vacuum pumps operate at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. The Edwards iH1000 iH 1000 system includes an iH80 dry pump and incorporate a direct-drive booster.

These Edwards iH 1000 dry v
46625

Condition:

  New

Part Number:

  P107315

Warranty:

  1-Year Limited Warranty







$46,625.00


Print Version

NEW Edwards MK5 iH1000 iH 1000 Subfab Harsh Chemical Series Semiconductor Dry Vacuum Pump A59030908


The Edwards MK5 iH1000 iH 1000 Subfab Semiconductor Dry Vacuum Pump System
3 phase 60 hz 460 VAC, Edwards PN A59030908

The MK5 Edwards iH1000 iH 1000 Series subfab dry vacuum pumps offers high reliability for difficult harsh processes, such as Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapor Deposition (LPCVD), where particulate, condensable and corrosive by-products are present. The Edwards iH1000 iH 1000 subfab dry vacuum pumps operate at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. The Edwards iH1000 iH 1000 system includes an iH80 dry pump and incorporate a direct-drive booster.

These Edwards iH 1000 dry vacuum pumps have a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economizer gas mode to reduce the consumption of purge nitrogen by the pumping system. You can manually control the iH system through the pump display terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM communications module accessory or you can use the iH single equipment monitor accessory to control the operation of the Edwards iH subfab dry vacuum pump. For detailed specs and instruction manual on this Edwards iH1000 iH 1000 dry harsh chemical subfab pump see AVAILABLE DOWNLOADS below.

FEATURES and BENEFITS:
  • Optimized utilities consumption
  • No preventative maintenance required
  • Cantilevered shafts and specially profiled rotors for better handling of particles
  • Reserve motor power also maximizes reliability on harsh-duty CVD applications
  • Corrosion Resistant materials allow pumping of corrosive gases
  • Higher operating temperatures provide ample margin to prevent gas condensation
  • The one-piece shaft eliminates the need for a motor coupling and a fifth pumping stage
    removes the need for a silencer and eliminates particle accumulation, both reducing the overall footprint

  • APPLICATIONS:
    • Load Lock
    • Transfer
    • Meteorology
    • Lithography
    • Physical Vapor Deposition PVD Process
    • Physical Vapor Deposition PVD Pre-clean
    • Rapid Thermal Anneal RTA
    • Strip/Ashing
    • Etching
    • Implant Source
    • High-Density Plasma Chemical Vapor Deposition HDP CVD
    • Rapid Thermal Processing RTP
    • Sub-Atmospheric Chemical Vapor Deposition SACVD
    • Tungsten Chemical Vapor Deposition WCVD
    • Modified Chemical-Vapor Deposition MCVD
    • Plasma-Enhanced Chemical Vapor Deposition PECVD
    • Low Pressure Chemical Vapor Deposition LPCVD



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PDF Logo Edwards iH Series Dry Semiconductor Vacuum Pumps.pdf

PDF Logo Edwards iH DryPump iH80 Instruction Manual.pdf

PDF Logo Edwards iH DryPump iH80 Spec Sheet.pdf

PDF Logo IH Dry Pump Schematics

PDF Logo Edwards iH DryPump iH1000 Instruction Manual.pdf

PDF Logo Edwards iH DryPump iH600 Instruction Manual.pdf

PDF Logo Edwards iH DryPump iH80 Instruction Manual.pdf

PDF Logo Edwards iH DryPump iH1000 Spec Sheet.pdf

PDF Logo Edwards iH DryPump iH1800 Spec Sheet.pdf

PDF Logo Edwards iH DryPump iH600 Spec Sheet.pdf

PDF Logo Edwards iH Dry Pump Brochure.pdf

PDF Logo Edwards iH Dry Pump Brochure.pdf



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CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



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