Agilent Varian TriScroll 300 and 600 Vacuum Pump Purge Gas Kit.
Agilent Part Number: PTSPURGEKIT.
These Agilent Varian OEM Triscroll purge kits enable the safe, proper purging of the main bearings through the bearing purge port, or through the gas ballast port on Triscroll 300 and 600 series pumps. This kit includes a flowmeter with manual throttle valve, a 5 psig relief valve and necessary tubing and fittings. The following applications require the use of this purge kit with a Triscroll 300 or 600 series pump:
- Cryopump regeneration
- Wet chamber cleanup
- High cycle rate Loadlock Applications
- Pumping organic solvents
- Pumping trace amounts of Bromine or Chlorine
- Pumping residual corrosives
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