This Inficon PSG500 digital Pirani standard gauge has an CF-R(CF 1.33) extended body, no setpoints and stainless steel measuring cell with tungsten filament and metal-sealed feedthrough.

The Inficon PSG5xx series gauges feature a compact, streamlined design, with a rugged aluminum housing and replaceable stainless steel sensor cell, qualifying them for use on semiconductor systems and for standard applications, such as forelines.

Measurement range (air, 02, CO, N2) is 5 x 10-4 to 1000mbar (3.75 x 10-4 to 750 Torr). One tactile switch for ATM and HV makes adjustments simple.

PSG500 series gauges can mount in any orientation and logarithmic signal output through the RJ-45 connector makes integration easy.

Other PSG5xx series gauges have 2 setpoints and filaments for corrosive applications.

The Inficon PSG5xx series digital Pirani standard gauges can be used with Inficon VGC501, VGC502 and VGC503 pressure gauge controllers and require a separate signal cable (P104428).