Leybold TURBOVAC 90i Turbo System, Conflat CF 4.5 inch Inlet, TURBO.POWER integra, TURBO.CONTROL i, Air-Cooling Kit,
And ScrollVac 7 Roughing Pump Package Deal.
These Leybold TURBOVAC 90i turbo package deals come with the TURBO.CONTROL i remote user interface, TURBO.POWER integra 24 VDC power supply, radial air-cooling kit, and ScrollVac SC7 dry scroll vacuum pump. The Leybold TURBO.CONTROL i remote user-interface has a display & front soft keys to allow monitoring and control of the TURBOVAC i-series turbo pump. These i-Series pumps are operation ready, having a fully functional built-in controller. The TURBO.CONTROL i can issue start & stop along with read & write parameters to the i-series turbo pump’s integrated controller. The included tabletop housing allows for mounting the TURBO.CONTROL i on the benchtop. This basic package deal with dry scroll roughing pump is great for high-vacuum laboratory research applications. This package deal is stored in our inventory as a kit, being made up of many separate parts, and the availability of each is shown in the Kit Components section below.

These Leybold TURBOVAC 90i turbomolecular high-vacuum pumps have a pumping speed up 90 liters per second (l/s) for Helium, with a Conflat CF 4.5 inch inlet flange, and an ISO KF-16 exhaust foreline flange. These Leybold TURBOVAC i-series turbo pumps require 24 VDC input power at a maximum of 240 Watts and have an integrated controller. All TURBOVAC i-series turbo pumps include a compact standard interface with RS485, USB and Digital I/O interfaces with 3 status LED's and the possibility to control one accessory (air cooler, valves, relay box...). All that is needed is a power supply and start/stop logic. This 90i turbo pump has Leybold part number 810041V1000.

Leybold TURBOVAC 90i Specifications:

Part Number: 810041V1000
Inlet Flange: Conflat CF 4.5 Inch
Base Pressure: 5 x 10^-10 mbar (3.7 x 10^-10 Torr)
Operating Speed: 72000 RPM
Operating Position: Any
Pumping Speed: He: 90 l/s
Cooling: Convection, Optional Forced Air or Water
Exhaust Flange: KF-16
Operating Voltages: 24 VDC
Maximum Power: 240 Watts
Compact Standard Interface with RS485, USB and Digital I/O
One accessory port

TURBOVAC 90i pumps with a CF flange are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10^-10 Torr range (if all-metal intake seal gaskets are used and the vacuum chamber is completely clean and baked out). Leybold TURBOVAC 90i turbo pumps with ISO-K flanges are limited (by permeation and outgassing of the rubber/elastomer O-ring seals) to an ultimate pressure in the 10^-8 Torr range. The intake flange of these pumps can be baked up to 100 °C when the turbo is water cooled.

This package deal includes both the Leybold TURBO.CONTROL i and TURBO.POWER integra. The TURBO.CONTROL i is a bench top or rack mountable remote user interface/power source, which communicates with the Leybold TURBOVAC i-series pumps through RS-485 and allows for full monitoring and control of the turbo pump. The TURBO.CONTROL i is the most popular option for laboratory and research applications. The TURBO.POWER integra is a local power supply only, which is typically mounted to the bottom of the turbo pump. The Leybold TURBOVAC i-series pumps, with the TURBO.POWER integra power supply mounted under the pump, is a compact low-cost high-vacuum pumping solution that is often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM) and Focused Ion-beam Systems (FIB).

Designed to offer maximum performance, the Leybold TURBOVAC i-Series turbomolecular vacuum pumps feature a cutting-edge rotor and drag-stage design which provide unparalleled speed, especially for light gases. A wide selection of interface options, housing and flange configurations as well as accessories completes this product line. The unique oil-free hybrid bearing system with maintenance-free ball bearings will boost your productivity and reduce cost of ownership. With a light gas pumping speed of up to 60% above current reference products and compression values around 100 times higher than previous generation products, they are especially suitable for operation with small backing pumps. Your benefits: a considerably smaller vacuum system, lower initial and operating costs along with a more compact footprint.

Performance:

Industry-leading pumping speed for light gases (up to 60% higher than existing products)
Optimized rotor diameter to provide maximum pumping performance

Flexibility:

Vacuum port design flexibility
Rotatable fore-vacuum port
Onboard turbo controller
Only requires power along with start/stop logic
Optional TURBO.CONTROL i remote user interface
Compact design with optional TURBO.POWER integra

Installation, operation and control:

Integrated 24 VDC drive electronics to avoid expensive cabling
Widest range of communication interfaces: USB, RS485, and remote 15 pin digital I/O as standard options
Highly efficient motor
Thermal isolation by design for optimized cooling of bearing and improved pump lifetime
Innovative shaft support system reduces vibration
Maintenance free upper passive magnetic bearing
Oil free, lifetime lubricated, lower mechanical ceramic ball bearing is field-replaceable

The Leybold TURBOVAC i-series turbo pumps are plug and play. They are simple and easy to install, operate and control, thanks to their flexible product design, integrated electronics, and a wide range of communication interfaces. They offer superior reliability due to an innovative pump design and the unique oil-free hybrid bearing concept with maintenance-free ball bearings available in the market today. The innovative shaft support system reduces vibration, noise, mechanical stress, and alleviates potential negative impact on vibration sensitive applications. Optimized cooling of the bearings is ensured through thermal isolation and a highly efficient motor. The pump is also equipped with a purge port to protect the bearings from critical gases and particles. As a result, the up-time and lifespan of the pump as well as your productivity are increased considerably. In combination with low costs of ownership, your vacuum system will be more efficient than ever.

Typical Turbo Pump Applications include:

General clean pumping applications
Scanning Electron Microscopes - SEM
Beam lines and high energy physics
Mass Spectrometry
Electron Microscopy
Sample Preparation
Research and Development
High Energy Physics
Industrial
Semiconductor
Coatings
Surface Science Instruments

The operating instructions manual and Leybold i-series TURBOVAC product brochures are available in the downloads.