Agilent Varian HS-16 Vacuum Diffusion Pump, 16 in. ASA, Std. Cold Cap, 10,000 l/s, 415V
Agilent Varian HS-16 High Vacuum Diffusion Pump with Standard Cold Cap, 10,000 l/s Pumping Speed
16 Inch ASA Inlet, 3 Inch ASA Exhaust, 415 VAC, Agilent Varian Part Number 79292326

These Varian Agilent High Throughput models include the series HS-16, HS-20, HS-32 and NHS-35. This is the HS-16 diffusion high throughput vacuum pump. They are the primary industrial standard for high vacuum pumping mechanism. The Agilent Varian HS-16 diffusion pumps have a high pumping speed for all gases and low cost per unit pumping speed when compared with other types of pump used in the same vacuum range. The full fractionating design allows vaporized fluid to be fractionated in the boiler and jet assembly. Contamination and decomposition products are pumped away and only the purest vapor reaches the top jet, assuring highest speed and lowest backstreaming. The vacuum fluid heater is mounted at the bottom of the pump body. The HS pumps have a fill and drain assembly for easy maintenance of pump fluid and continuous monitoring with thermal protection switches. Finned boilers increase the surface area which prolongs fluid life. The inlet is at the top, and the exhaust is through the foreline.

Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the exhaust. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high vacuum range (down to 10-9 Torr), diffusion pumps today can produce pressures approaching 10-10 Torr when properly used with modern fluids and accessories. The features that make the diffusion pump attractive for high and ultra-high vacuum use are its high pumping speed for all gases and low cost per unit pumping speed when compared with other types of pump used in the same vacuum pressure range. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump is typically used to maintain an outlet pressure around 1 mTorr.

These Varian model HS-16 high vacuum, high throughput diffusion pumps are new and can be ordered with either a 3-phase 240, 415 or 480 VAC heaters. When ordering please specify which voltage your application will require. We stock and sell diffusion pumps oils, e.g. IVP 704 diffusion pump fluids along with vacuum fittings, adapters, and replacement parts for your Varian HS-16 diffusion pumps. This pump uses IVP 704 diffusion pump fluid and is designed for high vacuum and fast pumping of large volumes of gas or vapor in production operations. For HS-16 Instruction Manual scroll down to manuals tab AVAILABLE DOWNLOADS and download the PDF.

Highlights For This Agilent Varian HS-16 Diffusion Pump
  • 16 Inch ASA Inlet Flange, 23.5 in. OD, 1.12 in. hole size (16 bolt holes)
  • ASA 3 in Outlet Flange, 7.5 in. OD, .75 in. hole size (4 bolt holes)
  • Standard Cold Cap
  • Maximum Pumping Speed 10,000 l/s air
  • 415V @ 2700 Watt Heater (3 required)
  • Designed To Be Used With IVP 704 Diffusion Pump Oil (3 Quarts)

Included with ASA Pumps:
One Inlet Flange O-ring48214001
One Foreline Flange O-ring660890348
Two 1/2" Hose 3/8 Pipe Barbed Connectors624301111
Four 3/8" Hose 3/8 Pipe Barbed Connectors624301110
Installation and Operation Manual699901140

ITEM DESCRIPTION PART NO.
1   Standard Cold Cap Assembly - Includes 10-32 SST Rd Hd screw & 10-32 SST Hex nut 79299301
1   Water-Cooled Halo Baffle K0143316
2   Cold Cap Water Connection:
Cold Cap Gasket/Grommet (Kit of 4)L8839301
Cold Cap Nut & Followers KitL8840301
3   Jet Assembly 83612401
4   Jet Coupling L6367301
5   Foreline Baffle Assembly 80798301
6   Sight Glass Service Kit for Pumps Built Before 1995:
3 Glass TubesF1755008
2 Brass Union 1/4 OD x 1/4 MPT622568108
2 Brass Elbow 69FL 6x4, 169VL6-4623451012
8 O-ring, Viton, Parker No. 2-011660892011
8 O-ring, Viton, Parker No. 2-111660892111
3 O-ring, Viton, Parker No. 2-221660892221
3 O-ring, Viton, Parker No. 2-213660892213
F6097301
6   Sight Glass Service Kit for Pumps Built After 1995 K8475001
7   Threaded Plug, Fill & Drain 77261001
8   Upper Thermal Switch, Temperature Setting 185°C K9050001
9   Lower Thermal Switch, Temperature Setting 390°C K9050002
10   Heater Nickel Wire 80 Inches, 14 AWG (2 per heater required) X3900-68006
10   Dalton Heater Wire 120 inches, 10 AWG (2 per heater required) X3900-68000
10b   Heater Wiring Connection Box
  Nickel Lug for No. 14 AWG 648056329
11   Heaters (Thtee heaters required per pump)
200 V / 2700 watt Heater Element With Leads647316025
200 V / 3200 watt Heater Element With Leads647316027
240 V or 415 V / 2700 watt Heater Element With Leads647316020
240 V or 415 V / 3200 watt Heater Element With Leads647316023
400 V / 2700 watt Heater Element With Leads647316037
400 V / 3200 watt Heater Element With Leads647316038
430 V / 2700 watt Heater Element With Leads647316039
430 V / 3200 watt Heater Element With Leads647316040
440 V / 2700 watt Heater Element With Leads647316041
440 V / 3200 watt Heater Element With Leads647316042
480 V / 2700 watt Heater Element With Leads647316030
480 V / 3200 watt Heater Element With Leads647316033
240 V or 415 V / 2700 watt Heater Element No Leads.
Used on Pumps Built Before May 1990
647316035
480 V / 2700 watt Heater Element No Leads.
Used on Pumps Built Before May 1990
647316045
12   Heater Crush Plate, required with heater replacement K4919001
13   Heater Clamping Plate K4917001
14   Heater Insulation Blanket 79309001
15   Heater Cover Plate 79308001
  O-Ring Kit includes:
1 Butyl O-ring for ASA Inlet Flange48214001
1 O-ring for Foreline Flange Buna Parker 2-348660890348
8 Fill and Drain O-rings, Viton Parker 2-213660892213
4 O-rings, Viton Parker 2-221660892221
1 Sight Glass O-ring Viton 2-232660892232
1 Graphite Sight glass GasketK8478001
K0377164
16   Butly Centering Ring for ASA Inlet Flange 48214001
17   Centering Ring for ASA Foreline Flange 660890348
17   Centering Ring for ISO Foreline Flange, 100K IC100SV
  Included with ASA pumps:
16  One O-ring for ASA Inlet Flange84349002
17  One O-ring for ASA Foreline Flange 660893432
  Installation and Operation Manual699901140
  DC-702 diffusion pump fluid, one gallon 695472008
  DC-704 diffusion pump fluid, one gallon 695474008
  DC-705 diffusion pump fluid, one gallon 695475008
Product: Agilent Varian HS-16 Vacuum Diffusion Pump, 16 in. ASA, Std. Cold Cap, 10,000 l/s, 415V
Condition:      New
Warranty:     As-Stated*
Part Number: P106987
Sale Price: $18,892.37       Regular Price: $21,468.60