モジュール式真空チャンバー
We offer a unique patented modular vacuum chamber solution for your process. Each side of the aluminum vacuum chamber frame geometry accepts one of many vacuum chamber wall options, allowing a myriad of feedthrough, vacuum port, or window possibilities. An optical breadboard on the vacuum side facilitates fastening hardware. Prototyping processes or running different high vacuum experiments is no longer limited by expensive, application-specific welded vacuum chambers. Patent No. US 9,969,527 B2.