Agilent Varian TwisTorr 74-FS Economic-Dependable Turbomolecular Vacuum Pump With ISO-63 Inlet, 60 L/S Pumping Speed, PN: X3502-64170

These Agilent Varian TwisTorr 74 FS turbomolecular vacuum pumps have an ISO-63 inlet flange, with 60 L/S pumping speed, and have the Agilent Floating Suspension with patented TwisTorr drag stages. The 74 FS model is a reliable compact turbo pump, its 1167 Hz drive frequency allows for long bearing life, and is an economic-dependable pump for high-vacuum applications. They have improved performance, including a newly designed labyrinth Twistorr drag stage technology, and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. These Agilent Varian 74 FS turbomolecular high-vacuum pumps have an ISO-63K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3502-64170. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 3.75x10-10 Torr when used correctly. These TwisTorr 74-FS turbo pumps require an outboard remote rack-mount or onboard pump-side-mounted controller. The required turbo pump cooling kit, either fan forced-air or water cooling, are sold separately.

These Agilent Varian TwistTorr 74 FS turbo pumps have an ISO-63K Inlet flange, has a pumping speed of 60 l/s of nitrogen, a KF-16 foreline flange, and ambient operating temperature from 5 °C to +35 °C. These 74 FS turbo pumps have a start up time of less than 2 minutes, rotational speed of 70,000 rpm, and recommended foreline roughing pumps of either dry scroll (IDP-3 or IDP7) or oil-sealed rotary vane (DS-40M or DS-102). The cooling requirements for forced-air cooling are ambient air temperature of 5 to 35 °C or with water cooling are a minimum flow of 0.30 gpm, between 15 to 25 °C at 45 to 75 psi.

The new Agilent Twistorr 74 FS offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo pump and can be used in a variety of fields:

Typical Turbo Pump Applications Include:

• Mass Spectrometry
• Gas Chromatography Mass Spectrometry (GC/MS)
• Liquid Chromatography Mass Spectrometry (LC/MS)
• Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
• Time-of-Flight Mass Spectrometry (TOF)

Vacuum in Research and Development:

• High Energy Physics
• Fusion Technology
• General UHV Research
• Synchrotron Light Sources Particle Accelerators

Nanotechnology Instruments:

• Electron Microscopy
• Scanning Electron Microscopy (SEM)
• Transmission Electron Microscopy (TEM)
• Focused Ion-beam Systems (FIB)
• Surface Analysis
• Semiconductor Manufacturing

Industrial Vacuum Processing:
Thin Film Deposition:

• Glass coating equipment (architectural and automotive glass, flat panel displays)
• Thin film solar cells production (photo-voltaic)
• Optical data media (CD, DVD, Magneto Optical Discs)
• Magnetic storage media
• Surface treatments
• Optical coating (ophthalmic, precision opto-electronics)
• Roll/Web coating on films or foils

Device Processing:

• TV & Monitor picture tube manufacture
• Evacuation of lamps (motorway lighting, beamers)
• X-Ray tubes & electron devices

General Processes:

• Vacuum Furnaces
• Metallurgy