Oerlikon Leybold Turbovac SL-80 Turbo & SC5D Vacuum Pump System, ISO-63 inlet, Dry Pump Package Deal.
These Oerlikon Leybold Turbovac SL-80 turbo vacuum pump package deals include the SL-80 turbo pump with ISO-63 inlet flange, Turbo.Drive TD400 Turbo.Control 300 controller and cables, along with an SC5D dry scroll backing pump. These package deals include everything needed except the interconnecting vacuum fittings that goes from the turbo to the scroll pump, which are sold separately (P105464), or a turbo pump cooling kit. As a minimum, air cooling is advised and is also listed below as an optional accessory.
This new generation of SL TURBOVAC turbomolecular pumps have improved mechanical rotor suspension and compound stage excels through a new compact design, improved vacuum performance and a standardized accessories program. The SL series pumps are among the quietest turbo pumps on the market today, the SL 80 pumps have less than 46 dB(A). The Oerlikon Leybold SL-80 with ISO-63 inlet flange has a 65 l/s pumping speed for nitrogen, can have an ultimate pressure as low as 1.5x10-10 Torr when backed with oil sealed rotary vane pump, and has a KF-16 roughing flange.
These turbo pumps can be cooled by water, air, or ambient cooling. Ambient cooling is only allowed for very low gas throughput, with low backing pressures (example 5 mTorr), and operated in a cool environment. We recommend at least air cooling for most applications. The SL-80 turbo pumps can be backed with foreline pressures as high as 15 Torr (20 mBar), water cooling is required for higher foreline pressure operation as the pump will produce extra heat.
The Oerlikon Leybold TURBOVAC SL turbomolecular pumps are highly flexible regarding the controller-mounting position, which can be placed onboard, as a bench-top unit or in a rack. In addition, the pumps can be mounted in virtually any position and at any angle. The turbomolecular pumps from the TURBOVAC SL product family are designed to handle the most advanced and demanding applications and requirements in research and industry, including: