Agilent Varian TwisTorr 305-FS Turbo Pump with ISO-100K Inlet, 255 l/s Pumping Speed, Air Cooled. Air Cooling Kit Sold Separately, Agilent Varian Part Number X3513-64008. These Agilent Varian TwisTorr 305 FS turbomolecular vacuum pumps are air cooled, with ISO 100K inlet flange, and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 305 FS turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. These Agilent Varian 304 FS turbomolecular high-vacuum pumps have an ISO-100K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3513-64008. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly. The required fan air cooling kit is sold separately.This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. This model is the 305-FS and requires an outboard remote controller unit for operations. A 305-IC version is also available with a sleek onboard integrated controller built to the side of the pump.Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 305 FS turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 305 FS turbo pump with ISO-100K flange has a pumping speed of 255 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 305 FS pumps have a start up time of 3 minutes, Rotational speed 60,000 rpm. Recommend foreline pumps are dry IDP-3, IDP-7, IDP-10 or wet DS-102, DS-302. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 50 l/h (0.22 GPM) with water temperature between +15 °C to +30 °C at a water pressure max of 5 bar (75 psi.) This unit is ambient air cooled but a water cooled unit is available.The new Agilent Twistorr 305FS offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy

Agilent Varian TwisTorr 305-FS Turbo Pump with ISO-100K Inlet, 255 l/s Pumping Speed, Water Cooled. Water Cooling Kit Sold Separately, Agilent Varian Part Number X3513-64012. These Agilent Varian TwisTorr 305 FS turbomolecular vacuum pumps are water cooled, with ISO 100K inlet flange, and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 305 FS turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. These Agilent Varian 305 FS turbomolecular high-vacuum pumps have an ISO-100K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3513-64012. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly. The required water cooling kit is sold separately.This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. This model is the 305-FS and requires an outboard remote controller unit for operations. A 305-IC version is also available with a sleek onboard integrated controller built to the side of the pump.Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 305 FS turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 305 FS turbo pump with ISO-100K flange has a pumping speed of 255 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 305 FS pumps have a start up time of 3 minutes, Rotational speed 60,000 rpm. Recommend foreline pumps are dry IDP-3, IDP-7, IDP-10 or wet DS-102, DS-302. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 50 l/h (0.22 GPM) with water temperature between +15 °C to +30 °C at a water pressure max of 5 bar (75 psi.) This unit is ambient air cooled but a water cooled unit is available.The new Agilent Twistorr 305FS offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy

Agilent Varian TwisTorr 305-FS Turbomolecular Vacuum Pump With Conflat 6 Inch Inlet, 255 l/s Pumping Speed, Air Cooled. Air Cooling Kit Sold Separately, Agilent Varian Part Number X3513-64009. These Agilent Varian TwisTorr 305 FS turbomolecular vacuum pumps are air cooled, with Conflat CF 6 inch inlet flange, and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 305 FS turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. The Agilent Varian TwisTorr 305 FS turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 100 degrees Celsius. The required fan air cooling kit is sold separately.This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. This model is the 305-FS and requires an outboard remote controller unit for operations. A 305-IC version is also available with a sleek onboard integrated controller built to the side of the pump.Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 305 FS turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 305 FS turbo pump with a Conflat CF 6 inch inlet flange has a pumping speed of 255 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 305 FS pumps have a start up time of 3 minutes, Rotational speed 60,000 rpm. Recommend foreline pumps are dry IDP-3, IDP-7, IDP-10 or wet DS-102, DS-302. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 50 l/h (0.22 GPM) with water temperature between +15 °C to +30 °C at a water pressure max of 5 bar (75 psi.) This unit is ambient air cooled but a water cooled unit is available.The new Agilent Twistorr 305FS offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy

Agilent Varian TwisTorr 305-FS Turbo Pump With Conflat 6 Inch Inlet, 255 l/s Pumping Speed, Water Cooled. Water Cooling Kit Sold Separately, Agilent Varian Part Number X3513-64013. These Agilent Varian TwisTorr 305 FS turbomolecular vacuum pumps are water cooled, with Conflat CF 6 inch inlet flange, and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 305 FS turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. The Agilent Varian TwisTorr 305 FS turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 100 degrees Celsius. The required water cooling kit is sold separately.This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. This model is the 305-FS and requires an outboard remote controller unit for operations. A 305-IC version is also available with a sleek onboard integrated controller built to the side of the pump.Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 305 FS turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 305 FS turbo pump with ISO-100K flange has a pumping speed of 255 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 305 FS pumps have a start up time of 3 minutes, Rotational speed 60,000 rpm. Recommend foreline pumps are dry IDP-3, IDP-7, IDP-10 or wet DS-102, DS-302. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 50 l/h (0.22 GPM) with water temperature between +15 °C to +30 °C at a water pressure max of 5 bar (75 psi.) This unit is ambient air cooled but a water cooled unit is available.The new Agilent Twistorr 305FS offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy Please see below in our Related section for additional accessories that may benefit your vacuum applications and needs. We offer a large variety of vacuum fittings, hoses, vacuum gauges, sensors/transducers and accessories sold separately on this website. For brochure and instruction manuals, please see the Download .PDF’s to the side.

Agilent Varian TwisTorr 305-IC Integrated Controller Turbo Pump, ISO-100K Inlet, 255 l/s Pumping Speed, RS-232, Air Cooled. Air Cooling Kit Sold Separately, Agilent Varian Part Number: X3513-64024. These Agilent Varian TwisTorr 305-IC (with Integrated Controller and RS232 communication protocol Serial Port) turbomolecular vacuum pumps are air cooled, with ISO-100K inlet flange, and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 305-IC turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. These Agilent Varian 305-IC turbomolecular high-vacuum pumps have an ISO-100K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3513-64024. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly. The required air cooling kit is sold separately. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. This model is the 305-IC and has an Integrated Controller. A 305-FS Turbo Pump is also available which needs a separate external remote controller. Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 305 IC turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 305IC turbo pump with ISO-100K flange has a pumping speed of 255 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 305 FS pumps have a start up time of 3 minutes, Rotational speed 60,000 rpm. Recommend foreline pumps are dry IDP-3, IDP-7, IDP-10 or wet DS-102, DS-302. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 50 l/h (0.22 GPM) with water temperature between +15 °C to +30 °C at a water pressure max of 5 bar (75 psi.) This unit is ambient air cooled without a fan, an accessory fan is available, also a water cooled pump version is also available. The new Agilent Twistorr 305IC offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy Please see below in our Related section for additional accessories that may benefit your vacuum applications and needs. We offer a large variety of vacuum fittings, hoses, vacuum gauges, sensors/transducers and accessories sold separately on this website. For brochure and user manuals, please see the PDF Download section below.

Agilent Varian TwisTorr 305-IC Integrated Controller Turbo Pump, Conflat CF 6 Inch Inlet, 255 l/s Pumping Speed, RS-232, Air Cooled. Air Cooling Kit Sold Separately, Agilent Varian Part Number: X3513-64025. These Agilent Varian TwisTorr 305-IC (with Integrated Controller and RS232 communication protocol Serial Port) turbomolecular vacuum pumps are air cooled, with Conflat CF 6 inch inlet flange, and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 305 FS turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. The Agilent Varian TwisTorr 305 FS turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 100 degrees Celsius. The required air cooling kit is sold separately. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. This model is the 305-IC and has an Integrated Controller. A 305-FS Turbo Pump is also available which needs a separate external remote controller. Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 305 IC turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 305IC turbo pump with ISO-100K flange has a pumping speed of 255 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 305 FS pumps have a start up time of 3 minutes, Rotational speed 60,000 rpm. Recommend foreline pumps are dry IDP-3, IDP-7, IDP-10 or wet DS-102, DS-302. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 50 l/h (0.22 GPM) with water temperature between +15 °C to +30 °C at a water pressure max of 5 bar (75 psi.) This unit is ambient air cooled without a fan, an accessory fan is available, also a water cooled pump version is also available. The new Agilent Twistorr 305IC offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy Please see below in our Related section for additional accessories that may benefit your vacuum applications and needs. We offer a large variety of vacuum fittings, hoses, vacuum gauges, sensors/transducers and accessories sold separately on this website. For brochure and user manuals, please see the PDF Downloads section below.

Agilent Varian TwisTorr 305-FS Rack Mount Turbomolecular Vacuum Pump Controller, With RS232/485 AG Remote. Agilent Varian Part Number PN: X3506-64130. These Agilent Varian TwisTorr AG rack mount controller with RS232/485 interface are use with the Agilent TwisTorr 305 FS turbomolceular vacuum pumps. The TwisTorr 305 FS controllers are micro-processor-controlled, solid-state, frequency converter with self-diagnostic and self-protection features. Features: Front / Remote / Serial Operation 232/485 24VDC pump fan cooling drive Vent valve drive Pump speed reading after stop command (stop speed reading) Pressure Reading Input voltage auto setting Please see below in our Related Products section for additional accessories that may benefit your vacuum application needs. We offer a large variety of vacuum fittings, hoses, vacuum gauges, sensors/transducers and accessories sold separately on this website. For brochures and user manuals, please see our document download section below.

Agilent Varian TwisTorr 305 FS On-Board 100-240 VAC Navigator Controller. Agilent Part Number: X3507-64131. This Agilent Varian OnBoard Navigator Controller for the TwisTorr305-FS series of turbo pumps requires a 100-240 VAC input. It is a microprocessor controlled frequency converter, fully controllable through PC software, with self-diagnostic and protection features that ensure the highest degree of reliability. This On-board Navigator can be mounted on board, either on the bottom or on the side of the pump, offering outstanding flexibility and simplicity. Please see the downloads for specs and use. This Agilent Varian 305FS OnBoard Controller has the following features: 100-240 VAC input. Drives the pumps of the TwisTorr 305FS Family. Powers the pump cooling fan. Drives the vent valve. Provides and acquires the pressure of the wide range gauge. Remote I/O compatible with the previous verson. Navigator default serial compatible with the previous RS 232 and 485 version. These controllers have an RS-232/485 serial port which allows the pump to be interfaced with the system controls and to be operated via PC with T-Plus software (sold separately, part number P104164). These Agilent 305FS controllers are Brand New and come with the full manufacturer’s warranty.

Agilent Varian TwisTorr 305 FS On-Board 24 VDC Navigator Turbo Pump Controller. Agilent Part Number: X3507-64130. This Agilent Varian OnBoard Navigator Controller for the TwisTorr305-FS series of turbo pumps requires a 24 VDC input. It is a microprocessor controlled frequency converter, fully controllable through PC software, with self-diagnostic and protection features that ensure the highest degree of reliability. This On-board Navigator can be mounted on board, either on the bottom or on the side of the pump, offering outstanding flexibility and simplicity. Please see the downloads for specs and use. This Agilent Varian 305FS OnBoard Controller has the following features: 24 VDC input. Drives the pumps of the TwisTorr 305FS Family. Powers the pump cooling fan. Drives the vent valve. Provides and acquires the pressure of the wide range gauge. Remote I/O compatible with the previous verson. Navigator default serial compatible with the previous RS 232 and 485 version. These controllers have an RS-232/485 serial port which allows the pump to be interfaced with the system controls and to be operated via PC with T-Plus software (sold separately, part number P104164). These Agilent 305FS controllers are Brand New and come with the full manufacturer’s warranty.

Varian Agilent AC Main Power Cable NEMA Plug, For Turbo Pump Controllers, 3 Meters. Agilent Varian Part Number PN: 9699958. This Agilent turbomolecular vacuum pump AC main power cable has a NEMA 5-15 plug wall outlet connection and works with most Agilent turbo pump controllers. It is 3 meters long, has Agilent Varian part number 9699958, and works with the following turbo pump models:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian TwisTorr 305 FS Turbomolecular Vacuum Pump To Controller Extension Cable, 5 Meters. Agilent Varian Part Number PN 9699942M007. These Agilent Varian TwisTorr 305 FS turbomolecular vacuum pump to rack mount controller extension cables are used to extend the distance the pump and its electronics. This turbo extension cable is 5 meters and has Agilent Varian Part Number PN 9699942M007.

Agilent Varian ISO-100 Inlet Screen, Splinter Shield, Used To Protect The Turbo Pump From Foreign Objects. Agilent Varian Part Number PN: X3500-68000. These Agilent Varian inlet screens are designed to protect the TwisTorr 305 FS and 305-IC (Integrated Controller) turbo molecular vacuum pumps with ISO-100 intake flanges. These turbo intake splinter shields help protect the pump from foreign objects and have Agilent Varian part number is X3500-68000.

Agilent Varian Conflat Turbo CF 6 Inch Inlet Screen, Splinter Shield, Used To Protect The Turbo Pump From Foreign Objects. Agilent Varian Part Number PN 9699302. These Agilent Varian inlet screens are designed to protect the TwisTorr 305 FS and 305-IC (Integrated Controller) turbo molecular vacuum pumps with Conflat CF 6 inch intake flanges. These turbo intake splinter shields help protect the pump from foreign objects and have Agilent Varian part number is 969-9302.

Agilent Varian Turbo Water Cooling Kit With Metal Hose Barbs, Fits Most Agilent Turbo Molecular Pumps Designed For 6x8 mm Tubing Size, Agilent Varian Part Number PN: 9699337 These metal water cooling kits are designed to provide water cooling of Agilent Varian TwisTorr 305 FS, 750 FS, and 850 FS turbomolecular vacuum pumps. They are designed to allow easy connection to 6 mm I.D. x 8 mm O.D. plastic hose, e.g., high quality Polyurethane (PUR), and have Agilent Varian part number PN 9699337.Fits most Agilent Varian turbo pumps, including models:TwisTorr 305 FS TwisTorr 305 IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Tubro-V 1001

Agilent Varian Turbo Water Cooling Kit With Plastic Hose Fittings, Fits Most Agilent Turbo Molecular Pumps. For 4 mm I.D. x 6 mm O.D. Plastic Hose, Agilent Varian Part Number PN: 9699347. These plastic tubing water cooling kits are designed to provide water cooling of Agilent Varian TwisTorr 305 FS, 750 FS, and 850 FS turbomolecular vacuum pumps. They are designed to allow easy connection to 4 mm I.D. x 6 mm O.D. plastic hose, and have Agilent Varian part number PN 9699347.Fits most Agilent Varian turbo pumps, including models: TwisTorr 305 FS TwisTorr 305 IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Fan Air Cooling Kit For TwisTorr 305 FS Turbomolecular Pumps With Rack Mount Controller. Agilent Varian Part Number PN: X3500-68011. This Agilent Varian air fan cooling kit for TwisTorr 305 FS turbomolecular vacuum pumps, the 305 FS cooling fan connects to the back of the rack mount controller (see middle photograph to the side). The fan cable plugs into J6 FAN on the back of the rack mount controller and we also sell a 5 meter fan extention cable, PN: 9699940. Please see our Related Product section below for additional accessories that may benefit your vacuum application needs. We offer a large variety of vacuum fittings, hoses, vacuum gauges, sensors/transducers and accessories sold separately on this website. For instruction manuals, please see the Downloads section below. Works with the following Agilent Varian turbo pumps:305 FS

Agilent Varian Fan Air Cooling Kit For TwisTorr 305-IC (with Internal Controller) Turbomolecular Pumps. Agilent Vacuum Part Number PN: X3500-68010This Agilent Varian 305-IC (with Integrated Controller) fan air cooling kit can be powered directly by 24V DC or using the fan output from the integrated controller. This Fan Kit when powered by 305-IC turbo''s integrated controller must also be used with an adapter kit Agilent PN (X3514-68001, see middle graphic to the side) that connects on to the integrated controller on the 305-IC turbo pump. For fan install instructions see pages 250-254 in the Agilent 305-IC TwisTorr turbomolecular user manual in pdf format below.

Agilent Varian Air Cooling Fan Extension Cable for TwisTorr 305-IC (Integrated Controller), 5 Meters. Agilent Varian Part Number 9699949. These Agilent Varian fan extension cables are used with TwisTorr 305-IC (Integrated Controller) turbo pumps. The TwisTorr 305 FS is a compact, reliable, energy efficient 300 l/s turbo drag pump with innovative breakthrough technologies that have lead to outstanding performace. They are designed for reliability and feature the new Agilent floating suspension. This ensures that the turbo has low vibration, low acoustical noise, optimal working conditions for the bearings with extended operating life and exceptional stability for demanding SEM applications. The base pressure for the TwisTorr 305 FS is as low as 1x10-10 Torr when backed with the recommended roughing pump. The turbo has a KF-16 roughing flange and an option to replace with the KF-25 roughing flange (pn: X3513-68000). Please see the available instruction manuals in our PDF download section Below.

Ideal Vacuum Fan Air Cooling Kit Extension Cable For Agilent Varian TwisTorr Turbomolecular Pumps With Rack Mount Controller. This Extension Cable is 5 Meters, Agilent Varian Part Number PN 9699940. This Ideal Vacuum fan air cooling kit extension cable, 5 meters long, is used with the Agilent Varian TwisTorr turbomolecular vacuum pumps, connects to the TwisTorr cooling fan to the rack mount controller (see bottom graphic to the side). The fan cable plugs into J6 on the back of the rack mount controller. Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS

Agilent Varian Vent Valve And Air Cooling Adapter Kit, Connects Cooling Fan or Vent Valve To TwistTorr 305-IC Turbo Pumps. Agilent Varian Part Number PN: X3514-68001. This Agilent Varian vent valve and air cooling connector kit is needed when installing a cooling fan or vent valve that will be powered by the TwisTorr 305-IC''s integrated controller. The center photograph shows how this adapter connects onto the 305-IC''s DB-15 port which handles: turbo pump input power, serial communication, remote input and output controls. Installation instructions can be found on pages 250-254 in the Agilent 305-IC TwisTorr turbomolecular user manual in pdf format below. Please see our Related Products section at the bottom for this page for additional accessories that may benefit your vacuum application needs. We offer a large variety of vacuum fittings, hoses, vacuum gauges, sensors/transducers and accessories sold separately on this website. For instruction manuals, please see the Downloads section below.

Agilent Varian Turbo Pump Vent Valve Kit, Delayed Vent, Normally Open (N.O.), 0.5 mm Orifice, For TwisTorr Rack Mount Controllers. Agilent Varian Part Number PN 9699844. These Agilent Varian turbo pump vent valve kits have 0.5 mm orifice, are normally open (N.O.), and are closed when the turbo controller is powered on. In the event that power is lost this vent valve will open and start introducing air into the turbo at a rate that will bring it to a safe stop. This helps extend the life of the turbo by limiting the amount of time it spends while passing through resonant frequecies, which are hard on the pump''s bearings (you can hear the pump actually get louder when it passes through these resonances). Venting after power loss is also important to prevent backstreaming from the backing pump, if vacuum is left on the turbo after power failure oils or debrises from the backing pump could be sucked back into the turbo pump. We recommend a vent valve and or a roughing line normally closed (N.C.) isolation valve to protect the turbo during power failure. This kit includes the hardware needed to mount to the side of a the Agilent Varian turbo pump. It is designed to plug into the Agilent Varian rack mount turbo pump controller, see J7 in center photograph, and have Agilent Varian Part Number 9699844. We also sell a vent valve extension cable 5 meters, Agilent Varian part number 9699941. Please see the available instruction manuals in our PDF download section Below. They works with the following turbo pump models:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS

Agilent Varian Turbo Vent Valve, Normally Open (N.O.), 1.2 mm Orifice, For TwisTorr or Turbo-V (Integrated Controller or Onboard Navigator) Turbo Pumps. Agilent Varian Part Number PN: 9699834. These Agilent Varian vent valves are designed for the TwisTorr FS and Turbo-V (with Integrated Controller or Onboard Navigator) turbo pumps. An adapter is also required so that the vent valve can get power and logic from the integrated controllers, the required adapter has Agilent Varian part number X3514-68001 (see center photograph). These Agilent Varian turbo pump vent valve kits have 1.2 mm orifice, are normally open (N.O.), and are closed when the turbo controller is powered on. In the event that power is lost this vent valve will open and start introducing air into the turbo at a rate that will bring it to a safe stop. This helps extend the life of the turbo by limiting the amount of time it spends while passing through resonant frequecies, which are hard on the pump''s bearings (you can hear the pump actually get louder when it passes through these resonances). Venting after power loss is also important to prevent backstreaming from the backing pump, if vacuum is left on the turbo after power failure oils or debrises from the backing pump could be sucked back into the turbo pump. We recommend a vent valve and or a roughing line normally closed (N.C.) isolation valve to protect the turbo during power failure. This kit includes the hardware needed to mount to the side of a the Agilent Varian turbo pump. We also sell a vent valve extension cable 5 meters for these 305-IC vent valves, Agilent Varian part number 9699949, which would be used to control venting by logic from a local tool or laboratory instrument. Please see the available instruction manuals in our PDF download section below.Works with the following Agilent Varian turbo pumps:TwisTorr 305-IC TwisTorr 404 FS Onboard Navigator TwisTorr 704 FS Onboard Navigator TwisTorr 804 FS Onboard Navigator Turbo-V 1001 Onboard Navigator

Agilent Varian Turbo Pump Vent Valve Extension Cable, Used With Rack Mount Controllers, 5 Meters Long. Agilent Varain Part Number 9699941. These Agilent Varian vent valve extension cable are used to extend the distance between the vent valve and the turbo controller, length is 5 meters long, and it plugs into J7 on the back side of the rack mount controller (see center photograph). This vent valve extension cable has Agilent Varain part number 9699941 and is often used with our vent valve Agilent Varian part number PN 9699844. Please see the available instruction manuals in our Downloads section below. Works with the following turbo pump models: TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS

Agilent Varian Turbo Purge Valve, 10 SCCM KF-16 x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 969-9239. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, a KF-16 flanged gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9239.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM KF-16 x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699241. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a KF-16 gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9241.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 10 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699240. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9240.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699242. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9242.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 10 SCCM has 7/16 and 1/4 Swagelok Fittings, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699232. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9232.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM has 7/16 and 1/4 Swagelok Fittings, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699236. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9236.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001