MKS PDR900 Vacuum Gauge Controller for Series 900 Transducers The MKS The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. The instrument sets new standards for vacuum gauge controllers and can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications. The PDR900 controller is the ideal solution for vacuum measurement, configuration of digital transducers and advanced system diagnostics. The controller features an easy to use menu-driven user interface, which guides the user through setup and configuration of remote transducer parameters. The readout unit communicates digitally with the transducer which eliminates analog measurement noise coupling via transducer cables. The unit automatically detects the 900 series transducer types, and can be used with both RS232 and RS485 transducers (Not compatible with 909/909A or 903 analog transducers). For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.

MKS HPS® Series 901P Plus MicroPirani™ Piezo Loadlock Vacuum Transducer ISO-KF NW 25, RS-232 PN 901P-21030The MKS HPS® Series 901P Plus Transducer has a combined sensor output that measures from 1x10-5 to 1,000 Torr for monitoring pump-down cycles. This unique patented transducer is designed specifically for the loadlock environment, the 901 Plus (901P) replaces up to three sensors in one compact package. The 901P provides both pressure measurement and atmospheric switching capabilities, by integrating the MicroPirani™ and piezo sensor technologies. The differential sensor ensures accurate atmospheric pressure sensing under varying barometric pressure conditions, for optimum loadlock performance. Customers requiring both a power supply and display can use the 901P with the PDR900 Series Controller sold on this website. For complete specs and operation information See AVAILABLE DOWNLOADS below. Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a registered trademark of MKS Instruments, Inc.MKS HPS® Series 901P Plus MicroPirani™ Piezo Loadlock Vacuum Transducer Options, Part Number (PN): ISO-KF NW 16, RS-232PN 901P-11030ISO-KF NW 16, RS-485PN 901P-12030ISO-KF NW 25, RS-232PN 901P-21030ISO-KF NW 25, RS-485PN 901P-220304 VCR-F, RS-232PN 901P-410304 VCR-F, RS-485PN 901P-420308 VCR-F, RS-232PN 901P-510308 VCR-F, RS-485PN 901P-52030ISO-KF NW 16 EXT, RS-232PN 901P-81030ISO-KF NW 16 EXT, RS-485PN 901P-82030

MKS HPS 902 Absolute Piezo Transducer KF16 RS-232, 0.1 to 1,000 Torr PN 902B-11010 The HPS® Series 902 absolute piezo transducer combines the pressure measurement technology of a MEMS-based piezo sensor with integrated electronics. The 902 provides an economical, absolute measurement that is independent of gas type. With a measurement range of 0.1 to 1,000 Torr full scale, the sensor is ideal for applications including semiconductor manufacturing, thin film coatings, freeze drying, lamps and light bulb production, medical devices, automotive and aerospace. Customers requiring both a power supply and display can use the 902 with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are Registered Trademarks MKS Instruments, Inc.Options, (PN) Part Number and Pricing : MKS HPS® Series 902 Absolute Piezo Transducer Red LED Transducer Display,PN 902001, 2009 Price $202ISO-KF NW 16, RS-485, PN 902-1112 2009 Price $576ISO-KF NW 16, RS-232, PN 902-1113, 2009 Price $563ISO-KF NW 16, Analog 0-10V, PN 902-1105, 2009 Price $5004 VCR-F, RS-485, PN 902-1212 2009 Price $5764 VCR-F, RS-232, PN 902-1213 2009 Price $5764 VCR-F, Analog 0-10V, PN 902-1205, 2009 Price $5128 VCR-F, RS-485, PN 902-1312 2009 Price $5828 VCR-F, RS-232, PN 902-1313 2009 Price $5828 VCR-F, Analog 0-10V, PN 902-1305 2009 Price $519All Prices subject to change without notice.

MKS HPS® Series 909AR Digital and Analog Hot Cathode Transducer, KF-40, RS-232 PN 909AR-51The HPS® hot cathode sensor is Bayard-Alpert style, which utilizes a fine wire collector located at the center of a grid. Due to its small area, few x-rays hit the collector; therefore, the gauge can measure very low pressures. The 909AR transducer includes two yttria-coated iridium filaments for reduced downtime. Yttria-coated iridium is resistant to damage caused by high oxygen partial pressures and exposure to atmosphere. The tube sensor operates at lower temperatures, giving a lower chemical reaction rate and minimizing thermal interference. The sensor includes a screen to shield it from large particles. The Series 909AR includes RS232 or RS485 digital communication as a standard feature. Digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. For additional process control, the 909AR has a relay set point. The set point pressure, hysteresis and direction can all be adjusted and monitored via the digital port. The Series 909AR also features analog controls and analog output with 0 to 10 volts semilogarithmic output, 1 volt per decade for simplified system integration. Customers requiring both a power supply and display can use the 909AR with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are Registered Trademarks of MKS Instruments, Inc.Options, (PN) Part Number and Pricing : MKS HPS® Series 909AR Digital and Analog Hot Cathode TransducerCF 1.33, RS-232, PN 909AR-11, 2009 Price $1221CF 1.33, RS-485, PN 909AR-12, 2009 Price $1221CF 2.75, RS-232, PN 909AR-21, 2009 Price $1234CF 2.75, RS-485, PN 909AR-22, 2009 Price $1234KF 16, RS-232, PN 909AR-31, 2009 Price $1202KF 16, RS-485, PN 909AR-32, 2009 Price $1202KF 25, RS-232, PN 909AR-41, 2009 Price $1214KF 25, RS-485, PN 909AR-42, 2009 Price $1214KF 40, RS-232, PN 909AR-51, 2009 Price $1221KF 40, RS-485, PN 909AR-52, 2009 Price $1221All Prices subject to change without notice.

MKS HPS® Series 910 DualTrans™ Micropirani Absolute Piezo Transducer, KF16, RS485, PN 910-12030 The 910-12030 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer is designed specifically for wide-range pressure measurement applications and features a size NW16 ISO-KF flange fitting. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 910 combines two pressure measurement technologies to provide superior performance and functionality. The 910 provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy. The Piezo is an absolute pressure sensor, providing a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from less than 1 Torr to 1500 Torr. The 910 has RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 910 also has an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The 910 has three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the piezo measurement or the combined absolute MicroPirani/Piezo measurement. The 910 compact design significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.

MKS HPS® Series 910 DualTrans™ Micropirani Absolute Piezo Transducer, KF16, RS232, PN 910-11 The HPS® Series 910 is a dual sensor transducer, combining the pressure measurement technology of Pirani and Piezo with an integrated electronic control circuit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The transducer includes a push button zero control than can be used when pressure is below 10-5 Torr. The Series 910 digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The 910 includes RS485 or RS232 communication as a standard feature. The Series 910 provides a 1 to 9 volt DC analog output signal at the male 15 pin high density D-sub connector. The transducer output is smoothed between the two sensors and reads from both sensors in the 5 to 15 Torr range. For process control, the 910 has three independent relay setpoints. Features of the setpoints can be set, adjusted and monitored through the digital port. Like all thermal conductivity sensors, the MicroPiraniTM is gas-type sensitive. The Piezo measures independent of gas type. The 910 provides a digital leak detection output that measures differential reading between the Piezo and MicroPirani™. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Customers requiring both a power supply and display can use the 910 DualTrans with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a Registered Trademarks MKS Instruments, Inc.Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 910 DualTrans™ Micropirani Absolute Piezo Transducer PN 910-11ISO-KF NW 16, RS-232, PN 910-11, 2009 Price $635ISO-KF NW 16, RS-485, PN 910-12, 2009 Price $6354 VCR-F, RS-232, PN 910-41, 2009 Price $6654 VCR-F, RS-485, PN 910-42, 2009 Price $6658 VCR-F, RS-232, PN 910-51, 2009 Price $6708 VCR-F, RS-485, PN 910-52, 2009 Price $670 All Prices subject to change without notice.

NEW MKS HPS® Series 910 DualTrans™ Micropirani Absolute Piezo Transducer, KF25, RS485, DISPLAY, No Relays, PN 910-21024 The MKS 910-21024 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer is designed specifically for wide-range pressure measurement applications and features a size NW25 ISO-KF flange fitting. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 910 combines two pressure measurement technologies to provide superior performance and functionality. The 910 provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy. The Piezo is an absolute pressure sensor, providing a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from less than 1 Torr to 1500 Torr. The 910 has RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 910 also has an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The 910 has three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the piezo measurement or the combined absolute MicroPirani/Piezo measurement. The 910 compact design significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system. NOTE: For complete specifications see the .pdf to the side at Downloads.

MKS HPS 925 MicroPirani Transducer NW/KF 16, RS-232, 10-5 to Atmosphere with Display. PN: 925-11034 The MKS 925 features an increased pressure measurement range from 1x10-5 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF16 flange RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and 3 relays. The integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed reading can be seen from >5 meters away on the high contrast display. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below. Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a registered Trademarks MKS Instruments. Options, and (PN) Part Number: NEW MKS HPS® Series 925 MicroPirani™ Transducer KF16, RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible) PN 925-11010, 2009 KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relay PN 925-11020, 2009 KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-11030, 2009 KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-12020, 2009 KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-12030, 2009 KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-21020, 2009 KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-21030, 2009 KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-22020, 2009 KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-22030, 2009 1/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible) PN 925-31010, 2009 1/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relay PN 925-31020, 2009 1/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-31030, 2009 1/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-32020, 2009 1/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-32030, 2009 VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C) compatible PN 925-41010, 2009 VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relay PN 925-41020, 2009 VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-41030, 2009 VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-42020, 2009 VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-42030, 2009 VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-51020, 2009 VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-51030, 2009 VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-52020, 2009 VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-52030, 2009

MKS HPS 925 MicroPirani Transducer NW/KF 25, RS-232, 10-5 to Atmosphere with Display. PN: 925-21034 The MKS 925 features an increased pressure measurement range from 1x10-5 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF25 flange RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and 3 relays. The integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed reading can be seen from >5 meters away on the high contrast display. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS to the side. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS to the side. Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a registered Trademarks MKS Instruments. Options, and (PN) Part Number: NEW MKS HPS® Series 925 MicroPirani™ Transducer KF16, RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible) PN 925-11010, 2009 KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relay PN 925-11020, 2009 KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-11030, 2009 KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-12020, 2009 KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-12030, 2009 KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-21020, 2009 KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-21030, 2009 KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-22020, 2009 KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-22030, 2009 1/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible) PN 925-31010, 2009 1/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relay PN 925-31020, 2009 1/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-31030, 2009 1/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-32020, 2009 1/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-32030, 2009 VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C) compatible PN 925-41010, 2009 VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relay PN 925-41020, 2009 VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-41030, 2009 VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-42020, 2009 VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-42030, 2009 VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-51020, 2009 VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-51030, 2009 VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relays PN 925-52020, 2009 VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relays PN 925-52030, 2009

Ideal Vacuum AC Power Supply Adapter for MKS 910 and 925 MicroPirani Transducers, Converts 120 VAC to 12 VDC, 15 pin connection, 6 foot (1.8 m) cable length. These Ideal Vacuum AC universal power supply wall transformers are for MKS Granville-Phillips® 275 Mini-Convectron® modular vacuum pressure transducers or for MKS Granville-Phillips 900 Series transducers with built in display. These cables convert 50-60 Hz, 120-240 VAC to 12 VDC and connect via a 15 pin connection. Cable length is 6 feet (1.8 m).

MKS HPS® Series 925 MicroPirani™ Transducer PN 925-22020The MKS 925 features an increased pressure measurement range from 1x10-5 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF25 flange RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and NO relays. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change; please call us at (505)872-0037 for updated pricing information. HPS® and MicroPirani™ are a registered Trademarks MKS Instruments.For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 925 MicroPirani™ Transducer KF16, RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible)PN 925-11010, 2009 Price $505KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relayPN 925-11020, 2009 Price $505KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-11030, 2009 Price $540KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-12020, 2009 Price $540KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-12030, 2009 Price $540KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-21020, 2009 Price $540KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-21030, 2009 Price $560KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-22020, 2009 Price $540KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-22030, 2009 Price $5801/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible)PN 925-31010, 2009 Price $5651/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relayPN 925-31020, 2009 Price $5451/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-31030, 2009 Price $5851/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-32020, 2009 Price $5451/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-32030, 2009 Price $585VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C) compatiblePN 925-41010, 2009 Price $580VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relayPN 925-41020, 2009 Price $560VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-41030, 2009 Price $600VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-42020, 2009 Price $560VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-42030, 2009 Price $600VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-51020, 2009 Price $565VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-51030, 2009 Price $605VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-52020, 2009 Price $565VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-52030, 2009 Price $605Prices are subject to change; please call us at (505)872-0037 for updated pricing information.

MKS HPS® Series 925 MicroPirani™ Transducer PN 925-21030The MKS 925 features an increased pressure measurement range from 1x10-5 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF25 flange RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and 3 relays. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a registered Trademarks MKS Instruments.For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a registered Trademarks MKS Instruments.Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 925 MicroPirani™ Transducer KF16, RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible)PN 925-11010, 2009 Price $505KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relayPN 925-11020, 2009 Price $505KF16, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-11030, 2009 Price $540KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-12020, 2009 Price $540KF16, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-12030, 2009 Price $540KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-21020, 2009 Price $540KF25, RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-21030, 2009 Price $560KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-22020, 2009 Price $540KF25, RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-22030, 2009 Price $5801/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C compatible)PN 925-31010, 2009 Price $5651/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relayPN 925-31020, 2009 Price $5451/8 inch NPT ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-31030, 2009 Price $5851/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-32020, 2009 Price $5451/8 inch NPT ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-32030, 2009 Price $585VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 9 pin sub-D male, 1 relay set point (925C) compatiblePN 925-41010, 2009 Price $580VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relayPN 925-41020, 2009 Price $560VCR4 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-41030, 2009 Price $600VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-42020, 2009 Price $560VCR4 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-42030, 2009 Price $600VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-51020, 2009 Price $565VCR8 ,RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-51030, 2009 Price $605VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, no relaysPN 925-52020, 2009 Price $565VCR8 ,RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, 3 relaysPN 925-52030, 2009 Price $605All Prices subject to change without notice.

MKS HPS 971 UniMag Transducer NW25, RS232, KF 25, 10-3 to 10-8 Torr SubD male no relay, PN 971B-21030The 971 UniMag transducer offers a measurement range from 1x10-8Torr to 5x10-3Torr and is based on cold cathode inverted magnetron sensor technology. The 971 is a cost effective solution for base pressure measurement and control. The Series 971 UniMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 971 UniMag transducers also has an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.The Series 971 UniMag has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 971 UniMag Transducer has a user changeable cold cathode anode module that offers easy serviceability without disassembling of transducer electronics. Customers requiring both a power supply and display can use the 971 UniMag with the PDR900 Series Controller sold on this website. For complete specs and operation information See AVAILABLE DOWNLOADS below.Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a Registered Trademarks MKS Instruments, Inc. Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 971 UniMagTransducerNW25 KF, RS-232, SUBD 15pinHD male-no relayPN 971-21020, 2009 Price $7102 3/4" CF, RS-232, SUBD 15pinHD male-no relayPN 971-71020, 2009 Price $815NW40 KF, RS-232, SUBD 15pinHD male-no relayPN 971-91020, 2009 Price $755NW25 KF, RS-485, SUBD 15pinHD male-no relayPN 971-22020, 2009 Price $7452 3/4" CF, RS-485, SUBD 15pinHD male-no relayPN 971-72020, 2009 Price $815NW40 KF, RS-485, SUBD 15pinHD male-no relayPN 971-92020, 2009 Price $755NW25 KF, RS-232, SUBD 15pinHD male-3 relaysPN 971-21030, 2009 Price $7852 3/4" CF, RS-232, SUBD 15pinHD male-3 relaysPN 971-71030, 2009 Price $855NW40 KF, RS-232, SUBD 15pinHD male-3 relaysPN 971-91030, 2009 Price $795NW25 KF, RS-485, SUBD 15pinHD male-3 relaysPN 971-22030, 2009 Price $7952 3/4" CF, RS-485, SUBD 15pinHD male-3 relaysPN 971-72030, 2009 Price $855NW40 KF, RS-485, SUBD 15pinHD male-3 relaysPN 971-92030, 2009 Price $895All Prices subject to change without notice.

MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode Transducer, KF-40, RS-232. MKS Part Number: 974-91020 The 974 QuadMag offers a measurement range from 1x10-8 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani™ and Piezo differential sensor technologies. The 974 has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974 can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. The Series 974 QuadMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 974 QuadMag transducers also has an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.The Series 974 QuadMag has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 974 QuadMag Transducer has a user changeable cold cathode anode module that offers easy serviceability without disassembling of transducer electronics. Customers requiring both a power supply and display can use the 974 QuadMag with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® is a registered trademark and MicroPirani™ is a Registered Trademark of ©2009 MKS Instruments, Inc. All rights reserved.Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode TransducerNW25 KF, RS-232, SUBD 15pinHD male-no relayPN 974-21020, 2009 Price $12952 3/4 CF, RS-232, SUBD 15pinHD male-no relayPN 974-71020, 2009 Price $1365NW40 KF, RS-232, SUBD 15pinHD male-no relayPN 974-91020, 2009 Price $1325NW25 KF, RS-485, SUBD 15pinHD male-no relayPN 974-22020, 2009 Price $12952 3/4 CF, RS-485, SUBD 15pinHD male-no relayPN 974-72020, 2009 Price $1335NW40 KF, RS-485, SUBD 15pinHD male-no relayPN 974-92020, 2009 Price $1275NW25 KF, RS-232, SUBD 15pinHD male-3 relaysPN 974-21030, 2009 Price $13052 3/4 CF, RS-232, SUBD 15pinHD male-3 relaysPN 974-71030, 2009 Price $1375NW40 KF, RS-232, SUBD 15pinHD male-3 relaysPN 974-91030, 2009 Price $1315NW25 KF, RS-485, SUBD 15pinHD male-3 relaysPN 974-22030, 2009 Price $13052 3/4 CF, RS-485, SUBD 15pinHD male-3 relaysPN 974-72030, 2009 Price $1395NW40 KF, RS-485, SUBD 15pinHD male-3 relaysPN 974-92030, 2009 Price $1315?All Prices subject to change without notice?

MKS 974B QuadMag Cold Cathode Transducer KF-25, 1 x 10-8 to 1500 Torr. RS232, Absolute Process Measurement. MKS Part Number: 974B-21020 The MKS 974B QuadMag Cold Cathode Transducer belongs to the MKS 970 Series, a family of compact, low cost, general-purpose transducers that utilize from one to four sensors- cold cathode, MicroPirani™, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10-8 Torr. In addition to its small size, broad range and lower cost, the 970 Series can be operated via digital communication or as an autonomous analog unit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The transducer includes a push button zero control than can be used when pressure is below 10-5 Torr. The MKS 974B QuadMag Cold Cathode Transducer with digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The MKS 974B Transducer supports RS485 or RS232 communication as a standard feature. This 974B QuadMag Cold Cathode Transducer provides a 1 to 9 volt DC analog output signal at the male 15 pin high density D-sub connector. The transducer output is smoothed between the two sensors and reads from both sensors in the 5 to 15 Torr range. For process control, the 974B has three independent relay setpoints. Features of the setpoints can be set, adjusted and monitored through the digital port. Like all thermal conductivity sensors, the MicroPiraniTM is gas-type sensitive. The Piezo measures independent of gas type. The 974B provides a digital leak detection output that measures differential reading between the Piezo and MicroPirani™. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Customers requiring both a power supply and display can use the 974B DualTrans with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.

MKS 974B QuadMag Cold Cathode Transducer KF-40, 1 x 10-8 to 1500 Torr. MKS Part Number: 974B-92020 The MKS 974B QuadMag Cold Cathode Transducer belongs to the MKS 970 Series, a family of compact, low cost, general-purpose transducers that utilize from one to four sensors- cold cathode, MicroPirani™, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10-8 Torr. In addition to its small size, broad range and lower cost, the 970 Series can be operated via digital communication or as an autonomous analog unit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The transducer includes a push button zero control than can be used when pressure is below 10-5 Torr. The MKS 974B QuadMag Cold Cathode Transducer with digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The MKS 974B Transducer supports RS485 or RS232 communication as a standard feature. This 974B QuadMag Cold Cathode Transducer provides a 1 to 9 volt DC analog output signal at the male 15 pin high density D-sub connector. The transducer output is smoothed between the two sensors and reads from both sensors in the 5 to 15 Torr range. For process control, the 974B has three independent relay setpoints. Features of the setpoints can be set, adjusted and monitored through the digital port. Like all thermal conductivity sensors, the MicroPiraniTM is gas-type sensitive. The Piezo measures independent of gas type. The 974B provides a digital leak detection output that measures differential reading between the Piezo and MicroPirani™. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Customers requiring both a power supply and display can use the 974B DualTrans with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.

MKS HPS Series 979B Atmosphere to Vacuum MicroPirani, KF-16. MKS Part Number: 979B-31 The MKS HPS® Series 979B Atmosphere to Vacuum (ATV) transducer is a general purpose vacuum transducer that provides a wide measurement range, from 10-10 torr (UHV) to atmospheric pressure. The 979B combines both the MEMS-based MicroPirani™ and a miniaturized hot cathode sensor in a single housing for simplified gauge integration. The 979B can be operated via digital communication (RS232 or RS485) or as an autonomous analog unit. Degas and filament select can be controlled via digital communication, push button control from the top panel or analog connections. Customers requiring both a power supply and display can use the 979B with the PDR900 Series Controller PN P102879 sold on this website. For Complete Specifications and Operation Information See the DOWNLOADS section. Features & Benefits.Combined vacuum sensors and wide measurement range eliminates complex manifold, wiring and control requirements. MicroPirani™ is automatically zeroed during pump down cycle for improved accuracy. Patented degas function for ease of control and 3 user-configurable relays for process control.

MKS HPS® Series 999 Quattro™ Multi-Sensor Hot Cathode Transducer, KF-40, RS232. MKS Part Number 999-51 The MKS HPS® Series 999 Quattro™ is the ultimate transducer solution, providing pressure measurement from 10-10 Torr to atmosphere, combined with atmospheric switching capabilities. The Quattro combines three of HPS'' key technologies into an integrated gauge solution, and has the functionality of four sensors in one compact package. The Quattro includes the miniaturized hot cathode ionization sensor, the MEMS-based MicroPirani™ sensor and a unique piezo sensor, offering both differential and absolute sensor functions. Customers requiring both a power supply and display can use the 999 with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information see the DOWNLOADS section.

Ideal Vacuum Cable for MKS MGPD-E Controller to Single 902 or 902B Piezo Transducer, DB9 Male to Female, 10 ft., RS232 RS485. This Ideal Vacuum cable connects an MKS MGPD-E digital power supply and readout to a single 902 or 902B Absolute Piezo Vacuum Pressure Transducer. DB male to DB9 female connectors for RS232 or RS485 serial communication. 10 feet (3 meters) length.

MKS Cable connects PDR900 to Series 902, 925, & 925C, RS232, 9 Pin to 15 Pin, 10ft. Part Number 100013613. This MKS Cable connects PDR900 to Series 902, 925, & 925C - 9 Pin, to 15 Pin Transducers, 10 ft. (3m) length, RS232. For selection guide of all MKS 900 Series Vacuum Transducers see AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® is a registered trademark of MKS Instruments, Inc.

MKS 15 Pin to 15 Pin Vacuum Gauge Controller Cable, Connects PRR900 To Transducers, RS232, 10 ft (3 meters) Long, MKS Part Number: 100013620. This MKS vacuum gauge cable connects the PDR900 controller to most MKS 900 series vacuum pressure transducers. It is a 15-pin male to female cable, 10 ft (3 meters) in length, has MKS part number 100013620, and works with the following Transducer models: MKS 901P MKS 909AR MKS 910 MKS 925 MKS 979B MKS 971 MKS 972 MKS 973 MKS 974 MKS 999 For additional information and references on the MKS 900 series vacuum pressure transducers, please see the selection guide available in the downloads section below. HPS is a registered trademark of MKS Instruments, Inc. Specifications and prices are subject to change without notice. HPS® is a registered trademark of MKS Instruments, Inc.