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Keyword       Ideal Vacuum Part Number       Manufacturer Part Number

× Vacuum Chambers Modular Vacuum Chambers Fittings and Flanges Feedthroughs Vacuum Valves Vacuum Pumps Turbo Pump Systems Rebuild Kits, Parts, And Motors Vacuum Fluids, Oils, and Grease Filters Traps and Silencers Vacuum Ovens Helium Leak Detectors Gauges And Controllers Pressure Measurement Chillers

Dry Semiconductor Vacuum Pumps and Accessories

The semiconductor vacuum pump must provide clean, reliable operation in difficult atmospheres that may include corrosive gases or high particulate loads. We carry new, industry-proven DryStar, EPX, and iGX Series Edwards semiconductor pumps. We also provide service for your pump and cost-effective, rebuilt A and AA series Ebara semiconductor pumps. We also offer many older rebuilt systems like the Edwards DP Series, QDP, and L series semiconductor pumps.



NEW SEMICONDUCTOR PUMPS


EDWARDS SEMICONDUCTOR PUMPS

EDWARDS SEMICONDUCTOR PUMPS Cover Image
DRYSTAR SERIES

EDWARDS SEMICONDUCTOR PUMPS

EDWARDS SEMICONDUCTOR PUMPS Cover Image
EPX SERIES

EDWARDS SEMICONDUCTOR PUMPS

EDWARDS SEMICONDUCTOR PUMPS Cover Image
iGX SERIES

EDWARDS SEMICONDUCTOR PUMPS

EDWARDS SEMICONDUCTOR PUMPS Cover Image
iH SERIES


REBUILT SEMICONDUCTOR PUMPS AND ACCESSORIES


EBARA SEMICONDUCTOR PUMPS Looping Image 1 EBARA SEMICONDUCTOR PUMPS Looping Image 2 EBARA SEMICONDUCTOR PUMPS Looping Image 3 EBARA SEMICONDUCTOR PUMPS Looping Image 4

EBARA SEMICONDUCTOR PUMPS

EBARA SEMICONDUCTOR PUMPS Cover Image
EDWARDS SEMICONDUCTOR PUMPS Looping Image 1 EDWARDS SEMICONDUCTOR PUMPS Looping Image 2 EDWARDS SEMICONDUCTOR PUMPS Looping Image 3 EDWARDS SEMICONDUCTOR PUMPS Looping Image 4

EDWARDS SEMICONDUCTOR PUMPS

EDWARDS SEMICONDUCTOR PUMPS Cover Image

semiconductor rebuild kits

semiconductor rebuild kits Cover Image

EDWARDS SEMICONDUCTOR PARTS

EDWARDS SEMICONDUCTOR PARTS Cover Image
Parts & Accessories

Semiconductor Adapters

Semiconductor Adapters Cover Image
Adapters - Bolts - O-Rings

EDWARDS CO-SEALS

EDWARDS CO-SEALS Cover Image

SEMICONDUCTOR PUMP SERVICE

SEMICONDUCTOR PUMP SERVICE Cover Image
Ideal Vacuum Logo Water Mark
CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com