We also offer Alcatel 2063CP and 2063CP+ Dual Stage Rotary Vane Vacuum Pump Rebuilt with perfluoropolyester (PFPE) inert fluids (Krytox® or Fomblin® Oils) for Semiconductor C1 and C2 compatibility.
These Alcatel 2063C dual stage rotary vane vacuum pumps have been fully rebuilt for use with perfluoropolyester (PFPE) inert fluids (Krytox® or Fomblin® Oils) to be semiconductor C1 and C2 compatible. C2 Semiconductor Compatible series pumps share the chemical resistant features of the C1 series but differ in ways that increase their resistance to chloro- and fluoro-containing gases found in semiconductor processing. The vane in the high-pressure stage is made from a composite material, which provides high chemical resistance. Inlet and exhaust hardware is stainless steel. Our rebuilt semiconductor C2 compatible pumps are prepared for inert PFPE fluids, which must be ordered separately.
Pumping Speed Displacement @ 60Hz 48 CFM. Ultimate pressure 1.5X10 -4 Torr.