MKS HPS 974 QuadMag MicroPirani Piezo Cold Cathode Transducer KF40 RS-232, 10-10 to 1000 Torr. PN: 974-91020

The 974 QuadMag offers a measurement range from 1x10^-8 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani™ and Piezo differential sensor technologies. The 974 has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10^-8Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974 can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. The Series 974 QuadMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement.

The 974 QuadMag transducers also has an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.The Series 974 QuadMag has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 974 QuadMag Transducer has a user changeable cold cathode anode module that offers easy serviceability without disassembling of transducer electronics. Customers requiring both a power supply and display can use the 974 QuadMag with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.